Magnetic contrast imaging of sub-100-nm devices with high spatial resolution is required for validation and failure analysis of magnetic recording technology (e.g. MRAM). Current approaches using transmission electron microscopy and ultra-high vacuum scanning electron microscopy are demanding in terms of complicated sample preparation, low sample throughput, and low-accessibility of these high-end instruments.

Klíčová slova
electron microscope; vacuum

TN02000020/009

angličtina

Uhlíř Vojtěch, Ing., Ph.D. - hlavní řešitel

Nanomagnetismus a spintronika
- odpovědné pracoviště (16.3.2023 - nezadáno)
Nanomagnetismus a spintronika
- příjemce (16.3.2023 - nezadáno)

Odpovědnost: Uhlíř Vojtěch, Ing., Ph.D.