Detail publikace

Study of Dielectric Nanolayers and Multilayer Coated Emitters

BURDA, D. ALLAHAM, M. HORÁČEK, M. KNÁPEK, A.

Originální název

Study of Dielectric Nanolayers and Multilayer Coated Emitters

Typ

článek ve sborníku ve WoS nebo Scopus

Jazyk

angličtina

Originální abstrakt

We report a fabrication method of multilayer coating of single tip field emitters. Tungsten field emitters coated with a multilayer of refractory oxides such as Al2O3 , HfO2 , which act as an additional potential barrier in the metal-vacuum system. Introducing additional barriers to the emitter's metal vacuum interface system can alter its emission characteristics. Thin oxide barriers were prepared using a recipe that involved the use of low-temperature atomic layer deposition. The parameters of the grown layers were studied by local electron atom probe tomography, field ion microscopy, and scanning transmission microscopy.

Klíčová slova

Cold Field Emission; Multilayer Dielectric Structure; Tungsten Tips; Electron Tunneling; Atomic Layer Deposition

Autoři

BURDA, D.; ALLAHAM, M.; HORÁČEK, M.; KNÁPEK, A.

Vydáno

27. 7. 2023

Nakladatel

IEEE

ISBN

979-8-3503-0143-4

Kniha

2023 IEEE 36th International Vacuum Nanoelectronics Conference (IVNC)

Strany od

53

Strany do

54

Strany počet

2

URL

https://ieeexplore.ieee.org/document/10188949

BibTex

@inproceedings{BUT184439,
  author="Daniel {Burda} and Mohammad Mahmoud {Allaham} and Miroslav {Horáček} and Alexandr {Knápek}",
  title="Study of Dielectric Nanolayers and Multilayer Coated Emitters",
  booktitle="2023 IEEE 36th International Vacuum Nanoelectronics Conference (IVNC)",
  year="2023",
  pages="53--54",
  publisher="IEEE",
  doi="10.1109/IVNC57695.2023.10188949",
  isbn="979-8-3503-0143-4",
  url="https://ieeexplore.ieee.org/document/10188949"
}