Publication detail

Study of Dielectric Nanolayers and Multilayer Coated Emitters

BURDA, D. ALLAHAM, M. HORÁČEK, M. KNÁPEK, A.

Original Title

Study of Dielectric Nanolayers and Multilayer Coated Emitters

Type

conference paper

Language

English

Original Abstract

We report a fabrication method of multilayer coating of single tip field emitters. Tungsten field emitters coated with a multilayer of refractory oxides such as Al2O3 , HfO2 , which act as an additional potential barrier in the metal-vacuum system. Introducing additional barriers to the emitter's metal vacuum interface system can alter its emission characteristics. Thin oxide barriers were prepared using a recipe that involved the use of low-temperature atomic layer deposition. The parameters of the grown layers were studied by local electron atom probe tomography, field ion microscopy, and scanning transmission microscopy.

Keywords

Cold Field Emission; Multilayer Dielectric Structure; Tungsten Tips; Electron Tunneling; Atomic Layer Deposition

Authors

BURDA, D.; ALLAHAM, M.; HORÁČEK, M.; KNÁPEK, A.

Released

27. 7. 2023

Publisher

IEEE

ISBN

979-8-3503-0143-4

Book

2023 IEEE 36th International Vacuum Nanoelectronics Conference (IVNC)

Pages from

53

Pages to

54

Pages count

2

URL

https://ieeexplore.ieee.org/document/10188949

BibTex

@inproceedings{BUT184439,
  author="Daniel {Burda} and Mohammad Mahmoud {Allaham} and Miroslav {Horáček} and Alexandr {Knápek}",
  title="Study of Dielectric Nanolayers and Multilayer Coated Emitters",
  booktitle="2023 IEEE 36th International Vacuum Nanoelectronics Conference (IVNC)",
  year="2023",
  pages="53--54",
  publisher="IEEE",
  doi="10.1109/IVNC57695.2023.10188949",
  isbn="979-8-3503-0143-4",
  url="https://ieeexplore.ieee.org/document/10188949"
}