Detail publikace

One-dimensional autocorrelation and power spectrum density functions of irregularregions

NEČAS, D. KLAPETEK, P.

Originální název

One-dimensional autocorrelation and power spectrum density functions of irregularregions

Typ

článek v časopise ve Web of Science, Jimp

Jazyk

angličtina

Originální abstrakt

Scanning probe microscopy (SPM) can be effectively used for evaluation of nanoscale roughness of surfaces obtained by different technological processes. Spectral properties of surface roughness can be evaluated using algorithms based on Fast Fourier Transform (FFT). For data that are not rectangular, this approach, howeverfails. In this paper we describe a modification of SPM data evaluation algorithms enabling to use FFT based approach even for irregular and non-continuous data This opens novel possibilities in analysis of local surface roughness in many fields,e.g. on nanoparticles, semiconductor structures or any other nanostructured samples prepared using nanotechnology methods. Together with theoretical description of proposed method we present benchmarks for its performance and typical results of its application on different samples.

Klíčová slova

Scanning probemicroscopy, Atomic forcemicroscopy, Roughness, Frequency analysis

Autoři

NEČAS, D.; KLAPETEK, P.

Rok RIV

2013

Vydáno

1. 1. 2013

ISSN

0304-3991

Periodikum

Ultramicroscopy

Ročník

124

Číslo

1

Stát

Nizozemsko

Strany od

13

Strany do

19

Strany počet

7

BibTex

@article{BUT97280,
  author="David {Nečas} and Petr {Klapetek}",
  title="One-dimensional autocorrelation and power spectrum density functions of irregularregions",
  journal="Ultramicroscopy",
  year="2013",
  volume="124",
  number="1",
  pages="13--19",
  doi="10.1016/j.ultramic.2012.08.002",
  issn="0304-3991"
}