Detail publikace

Multi-Channel Detection of the Angular Distribution of Backscattered Electrons in the Scanning Low Energy Electron Microscope.

MÜLLEROVÁ, I., KONVALINA I.

Originální název

Multi-Channel Detection of the Angular Distribution of Backscattered Electrons in the Scanning Low Energy Electron Microscope.

Typ

článek v časopise - ostatní, Jost

Jazyk

angličtina

Originální abstrakt

The final image contrast in the scanning electron microscope (SEM) is not only a product of the interaction of primary electrons with the target, but the collection efficiency of the detector with its energy and angular distributions, as well as any subsequent signal processing, also play a role. In order to arrive at high signal-to-noise ratio, as many signal species should be caught as possible, though achieving a high contrast might require the selection of only a small part of the emission spectra. Multi-channel parallel detectors are promising in this respect.

Klíčová slova

multi-channel detector, angular distribution, low energy electron microscope

Autoři

MÜLLEROVÁ, I., KONVALINA I.

Vydáno

30. 7. 2006

ISSN

1431-9276

Periodikum

MICROSCOPY AND MICROANALYSIS

Ročník

12

Číslo

2

Stát

Spojené státy americké

Strany od

1438

Strany do

1439

Strany počet

2

BibTex

@article{BUT44384,
  author="Ilona {Müllerová} and Ivo {Konvalina}",
  title="Multi-Channel Detection of the Angular Distribution of Backscattered Electrons in the Scanning Low Energy Electron Microscope.",
  journal="MICROSCOPY AND MICROANALYSIS",
  year="2006",
  volume="12",
  number="2",
  pages="2",
  issn="1431-9276"
}