Detail publikace

Correlation of thermal stability of the mechanical and optical properties of diamond-like carbon films

FRANTA, D. BURŠÍKOVÁ, V. OHLÍDAL, I. ŠŤAHEL, P. OHLÍDAL, M. NEČAS, D.

Originální název

Correlation of thermal stability of the mechanical and optical properties of diamond-like carbon films

Typ

článek v časopise - ostatní, Jost

Jazyk

angličtina

Originální abstrakt

The study of the influence of the annealing on the mechanical and optical properties of the plasma deposited DLC films is performed. The DLC films were prepared for different values of hydrogen content from the mixture of methan and hydrogen in PECVD reactor. The optical properties of aforementioned DLC films were studied ex-situ using variable angle spectroscopic ellipsometry and spectroscopic reflectometry applied within the near-UV, visible and near-IR regions. For optical constants determination our dispersion model based on parametrization of the densities of electronic states was used. The dependence of the hardness and elastic modulus on the hydrogen content in the deposition feed was determined using depth sensing indentation technique.The connection between the hardness and elastic modulus on the one hand and optical constants on the other hand was shown. The annealing of the DLC films strongly changed their mechanical, optical and electrical properties.

Klíčová slova

Thermal stability, Optical constants, Electronic structure, Free-carrier anisotropy

Autoři

FRANTA, D.; BURŠÍKOVÁ, V.; OHLÍDAL, I.; ŠŤAHEL, P.; OHLÍDAL, M.; NEČAS, D.

Rok RIV

2007

Vydáno

10. 6. 2007

Nakladatel

Elsevier

Místo

Amsterdam

ISSN

0925-9635

Periodikum

Diamond and Related Materials

Ročník

16

Číslo

4-7

Stát

Nizozemsko

Strany od

1331

Strany do

1335

Strany počet

5

BibTex

@article{BUT43840,
  author="Daniel {Franta} and Vilma {Buršíková} and Ivan {Ohlídal} and Pavel {Šťahel} and Miloslav {Ohlídal} and David {Nečas}",
  title="Correlation of thermal stability of the mechanical and optical properties of diamond-like carbon films",
  journal="Diamond and Related Materials",
  year="2007",
  volume="16",
  number="4-7",
  pages="1331--1335",
  issn="0925-9635"
}