Detail publikace

Computer Controlled Low Energy SEM

MIKA, F. RYŠÁVKA, J. LOPOUR, F. ZADRAŽIL, M. MÜLLEROVÁ, I. FRANK, L.

Originální název

Computer Controlled Low Energy SEM

Typ

článek v časopise - ostatní, Jost

Jazyk

angličtina

Originální abstrakt

In the last two decades the low energy range is employed in the SEM operation for many reasons that include reduced charging of non-conductive specimens, better visualization of surface relief, larger emitted signals and, at very low energies below 100 eV, new families of image contrasts. There fore software for the determination of the critical energy was implemented to the comercial SEM microscope. First results are presented here.

Klíčová slova v angličtině

SEM, non-conductors, critical energy

Autoři

MIKA, F.; RYŠÁVKA, J.; LOPOUR, F.; ZADRAŽIL, M.; MÜLLEROVÁ, I.; FRANK, L.

Vydáno

7. 9. 2003

Strany od

116

Strany do

117

Strany počet

2

BibTex

@article{BUT41446,
  author="Filip {Mika} and Josef {Ryšávka} and Filip {Lopour} and Martin {Zadražil} and Ilona {Müllerová} and Luděk {Frank}",
  title="Computer Controlled Low Energy SEM",
  year="2003",
  volume="9",
  number="3",
  pages="2"
}