Detail publikace

PRECISE MEASUREMENT OF THICKNESS DISTRIBUTION OF NON-UNIFORM THIN FILMS BY IMAGING SPECTROSCOPIC REFLECTOMETRY

OHLÍDAL, M. OHLÍDAL, I. KLAPETEK, P. NEČAS, D.

Originální název

PRECISE MEASUREMENT OF THICKNESS DISTRIBUTION OF NON-UNIFORM THIN FILMS BY IMAGING SPECTROSCOPIC REFLECTOMETRY

Typ

článek ve sborníku ve WoS nebo Scopus

Jazyk

angličtina

Originální abstrakt

A new method of imaging spectroscopic photometry enabling us to perform the complete optical characterization of thin films exhibiting area non-uniformity in optical parameters is presented. An original imaging spectroscopic photometer operating in the reflection mode at normal incidence is used to apply this method. The method described was used to characterize carbon-nitride thin films.

Klíčová slova

non-uniform thin films, imaging spectroscopic reflectometry

Autoři

OHLÍDAL, M.; OHLÍDAL, I.; KLAPETEK, P.; NEČAS, D.

Rok RIV

2009

Vydáno

11. 9. 2009

Nakladatel

IMEKO

Místo

Lisabon

ISBN

978-963-88410-0-1

Kniha

Proceedings of IMEKO 2009

Strany od

100

Strany do

105

Strany počet

6

BibTex

@inproceedings{BUT32157,
  author="Miloslav {Ohlídal} and Ivan {Ohlídal} and Petr {Klapetek} and David {Nečas}",
  title="PRECISE MEASUREMENT OF THICKNESS DISTRIBUTION OF NON-UNIFORM THIN FILMS BY IMAGING SPECTROSCOPIC REFLECTOMETRY",
  booktitle="Proceedings of IMEKO 2009",
  year="2009",
  pages="100--105",
  publisher="IMEKO",
  address="Lisabon",
  isbn="978-963-88410-0-1"
}