Detail publikace

Numerical Analysis of ECR Plasma Source

NEŠPOR, D. HAVLÍČEK, L. JUŘÍK, K.

Originální název

Numerical Analysis of ECR Plasma Source

Typ

článek ve sborníku ve WoS nebo Scopus

Jazyk

angličtina

Originální abstrakt

Gases ionizers usage ECR (Electron Cyclotron Resonance) is one of the methods for creating two temperature plasma. Thanks to high efficiency is this method suitable for wide spectrum of applications. Especially for the systems which are sensitives on high power electrical noise, cooling is problematic for them or they have limited power supplier (electron microscopy, plasma actuators, etc.). The main disadvantage of ECR plasma sources is complicated design compared to the other ionisation techniques. The crucial is tune of the magnetostatics and high frequency fields in active area of the source. Working frequency also plays an important role and even electric and magnetic field ratio. This paper describes how to calculate electric and magnetic fields inside ECR plasma sources and how to enable tune and optimization of these sources. Paper also shows how to make visualisation of the active ECR surfaces and thereby deepening the understanding of how the sources works.

Klíčová slova

ECR, plasma source

Autoři

NEŠPOR, D.; HAVLÍČEK, L.; JUŘÍK, K.

Vydáno

1. 12. 2021

Nakladatel

IEEE

Místo

NEW YORK

ISBN

978-1-7281-7247-7

Kniha

2021 Photonics & Electromagnetics Research Symposium (PIERS)

ISSN

1559-9450

Periodikum

Progress In Electromagnetics

Stát

Spojené státy americké

Strany od

419

Strany do

422

Strany počet

4

URL

https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=9694836

BibTex

@inproceedings{BUT179937,
  author="Dušan {Nešpor} and Lukáš {Havlíček} and Karel {Juřík}",
  title="Numerical Analysis of ECR Plasma Source",
  booktitle="2021 Photonics & Electromagnetics Research Symposium (PIERS)",
  year="2021",
  journal="Progress In Electromagnetics",
  pages="419--422",
  publisher="IEEE",
  address="NEW YORK",
  doi="10.1109/PIERS53385.2021.9694836",
  isbn="978-1-7281-7247-7",
  issn="1559-9450",
  url="https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=9694836"
}