Detail publikace

Ellipsometry of surface layers on a 1-kg sphere from natural silicon

KLENOVSKÝ, P. ZŮDA, J. KLAPETEK, P. HUMLÍČEK, J.

Originální název

Ellipsometry of surface layers on a 1-kg sphere from natural silicon

Typ

článek v časopise ve Web of Science, Jimp

Jazyk

angličtina

Originální abstrakt

We have investigated surface layers on a monocrystalline float-zone, n-type (2400–2990 cm) spherewith the diameter of 93.6004 mm. Ellipsometric spectra in the visible–ultraviolet range reveals the presence of thin layers of amorphous Si as well as oxide overlayer. We have also prepared a series of flat Si samples, polished using slurries with 1–6 m grits; the overlayers were examined by mid–infrared ellipsometry, including the range of polar vibrations of the Si-O bonds. AFM measurements on the sphere were used to test the models of its surface.

Klíčová slova

Silicon Surface layers; Ellipsometry; 1-kg mass standard

Autoři

KLENOVSKÝ, P.; ZŮDA, J.; KLAPETEK, P.; HUMLÍČEK, J.

Vydáno

1. 11. 2017

ISSN

0169-4332

Periodikum

Applied Surface Science

Ročník

421

Číslo

1

Stát

Nizozemsko

Strany od

542

Strany do

546

Strany počet

5

BibTex

@article{BUT134544,
  author="Petr {Klenovský} and Jaroslav {Zůda} and Petr {Klapetek} and Josef {Humlíček}",
  title="Ellipsometry of surface layers on a 1-kg sphere from natural silicon",
  journal="Applied Surface Science",
  year="2017",
  volume="421",
  number="1",
  pages="542--546",
  doi="10.1016/j.apsusc.2016.08.135",
  issn="0169-4332"
}