Detail publikace

Determination of local thickness values of non-uniform thin films by imaging spectroscopic reflectometer with enhanced spatial resolution

VODÁK, J. NEČAS, D. OHLÍDAL, M. OHLÍDAL, I.

Originální název

Determination of local thickness values of non-uniform thin films by imaging spectroscopic reflectometer with enhanced spatial resolution

Typ

článek v časopise ve Web of Science, Jimp

Jazyk

angličtina

Originální abstrakt

In this paper an imaging spectroscopic reflectometer with enhanced spatial resolution is presented. Main features of its design, experimental data acquisition, i.e. maps of thin film spectral dependencies of local reflectance and the local thickness map determination are described. The ability of this instrument to characterize thin film thickness non-uniformity with high gradients is demonstrated on measurements of thin film edges. A comparison with an older device is also presented.

Klíčová slova

enhanced spatial resolution, high gradient thickness distribution, imaging spectroscopic reflectometer, non-uniform thin films

Autoři

VODÁK, J.; NEČAS, D.; OHLÍDAL, M.; OHLÍDAL, I.

Vydáno

12. 1. 2017

Nakladatel

IOP Publishing

ISSN

0957-0233

Periodikum

Measurement Science and Technology

Ročník

28

Číslo

2

Stát

Spojené království Velké Británie a Severního Irska

Strany od

025205

Strany do

025205-6

Strany počet

6

URL

http://iopscience.iop.org/article/10.1088/1361-6501/aa5534