Detail publikace

Sputtered and screen-printed metal oxide-based integrated microsensor arrays for the quantitative analysis of gas mixtures

STANKOVA, M. IVANOV, P. LLOBET, E. BREZMES, J. VILANOVA, X. GRACIA, I. CANÉ, C. HUBÁLEK, J. MALYSZ, K. CORREIG, X.

Originální název

Sputtered and screen-printed metal oxide-based integrated microsensor arrays for the quantitative analysis of gas mixtures

Typ

článek v časopise - ostatní, Jost

Jazyk

angličtina

Originální abstrakt

Either by screen-printing or sputtering, sensitive layers of tin oxide were deposited on silicon micromachined substrates (four-element integrated microarrays). The procedures allow the deposition of sensing layers before membranes have been etched, which leads to gas micro-sensors with an excellent fabrication yield. The response of the different microarrays to ethanol, acetone and ammonia vapours and their binary mixtures was studied. The influence of ambient humidity was also investigated. By using an integrated array of four integrated microsensors operated at two different temperatures and a fuzzy ARTMAP neural network, it was possible to simultaneously identify and quantify the different species (success rate was 100%). These results confirm the viability of the techniques introduced to obtain micromachined sensors suitable for battery-powered gas/vapour monitors.

Klíčová slova

tin oxide; r.f. sputtering; screen-printing; integrated microarray; micro-hotplate; quantitative gas analysis

Autoři

STANKOVA, M.; IVANOV, P.; LLOBET, E.; BREZMES, J.; VILANOVA, X.; GRACIA, I.; CANÉ, C.; HUBÁLEK, J.; MALYSZ, K.; CORREIG, X.

Vydáno

29. 9. 2004

Nakladatel

ELSEVIER SCIENCE SA

Místo

LAUSANNE, SWITZERLAND

ISSN

0925-4005

Periodikum

Sensors and Actuators B: Chemical

Ročník

103

Číslo

1-2

Stát

Švýcarská konfederace

Strany od

23

Strany do

30

Strany počet

8

BibTex

@article{BUT48005,
  author="Mariana {Stankova} and Peter {Ivanov} and Eduard {Llobet} and Jesús {Brezmes} and Xavier {Vilanova} and I. {Gracia} and Carlas {Cané} and Jaromír {Hubálek} and Karel {Malysz} and Xavier {Correig}",
  title="Sputtered and screen-printed metal oxide-based integrated microsensor arrays for the quantitative analysis of gas mixtures",
  journal="Sensors and Actuators B: Chemical",
  year="2004",
  volume="103",
  number="1-2",
  pages="23--30",
  issn="0925-4005"
}