Detail publikace

Comparison of three focus sensors for optical topography measurement of rough surfaces

ŠARBORT, M. HOLÁ, M. PAVELKA, J. SCHOVÁNEK, P. ŘEŘUCHA, Š. OULEHLA, J. FOŘT, T. LAZAR, J.

Originální název

Comparison of three focus sensors for optical topography measurement of rough surfaces

Typ

článek v časopise ve Web of Science, Jimp

Jazyk

angličtina

Originální abstrakt

The study compares three variants of focus sensors designed for the optical topography measurement of rough surface specimens with submicron accuracy. We present a theoretical analysis of the focus sensor principles and the experimental measurements with a single point laser probe. A low coherent illumination beam was provided by a monochromatic laser source and a rotating diffuser, which reduced the speckles generated by the rough surface. The reflected beam was modulated by three specific optical elements (axicon, double wedge prism, four spherical lenses) realized by a spatial light modulator. A digital camera detected the output intensity patterns that were evaluated by the intensity centroid method. The results showed a good coincidence of the surface profiles obtained by the three sensor variants with the root-mean-square deviations below one micron. We discuss the results obtained for several specimens with various surface roughness and compare the differences between the three focus sensor variants. (C) 2019 Optical Society of America under the terms of the OSA Open Access Publishing Agreement

Klíčová slova

PROFILOMETRYSTYLUSBEAM

Autoři

ŠARBORT, M.; HOLÁ, M.; PAVELKA, J.; SCHOVÁNEK, P.; ŘEŘUCHA, Š.; OULEHLA, J.; FOŘT, T.; LAZAR, J.

Vydáno

11. 11. 2019

ISSN

1094-4087

Periodikum

OPTICS EXPRESS

Ročník

27

Číslo

23

Stát

Spojené státy americké

Strany od

33459

Strany do

33473

Strany počet

15

URL

https://opg.optica.org/oe/fulltext.cfm?uri=oe-27-23-33459&id=422804

BibTex

@article{BUT177917,
  author="Martin {Šarbort} and Miroslava {Holá} and Jan {Pavelka} and Petr {Schovánek} and Šimon {Řeřucha} and Jindřich {Oulehla} and Tomáš {Fořt} and Josef {Lazar}",
  title="Comparison of three focus sensors for optical topography measurement of rough surfaces
",
  journal="OPTICS EXPRESS",
  year="2019",
  volume="27",
  number="23",
  pages="33459--33473",
  issn="1094-4087",
  url="https://opg.optica.org/oe/fulltext.cfm?uri=oe-27-23-33459&id=422804"
}