Detail publikačního výsledku

NOISE AND STEP HEIGHT PERFORMANCE OF SELECTED OPTICAL SURFACE MEASURING INSTRUMENTS

HARČARÍK, M.; JANKOVÝCH, R.

Originální název

NOISE AND STEP HEIGHT PERFORMANCE OF SELECTED OPTICAL SURFACE MEASURING INSTRUMENTS

Anglický název

NOISE AND STEP HEIGHT PERFORMANCE OF SELECTED OPTICAL SURFACE MEASURING INSTRUMENTS

Druh

Článek Scopus

Originální abstrakt

Increasing demands for manufacturing quality and new standards in surface metrology foreshadow a widespread adoption of 3D surface topography measurement in manufacturing quality control. This raises the question of instrument selection. Coherence scanning interferometry and laser scanning confocal microscopy are some of the most common technologies in optical measurement of surface topography. These methods differ significantly in their suitability for different types of measurement. This article provides a comparison of the measurement noise and step height measurement performance two measuring instruments based on these two principles in relation to objectives used for measurement. Such data can be used to inform instrument selection in an industrial environment.

Anglický abstrakt

Increasing demands for manufacturing quality and new standards in surface metrology foreshadow a widespread adoption of 3D surface topography measurement in manufacturing quality control. This raises the question of instrument selection. Coherence scanning interferometry and laser scanning confocal microscopy are some of the most common technologies in optical measurement of surface topography. These methods differ significantly in their suitability for different types of measurement. This article provides a comparison of the measurement noise and step height measurement performance two measuring instruments based on these two principles in relation to objectives used for measurement. Such data can be used to inform instrument selection in an industrial environment.

Klíčová slova

surface texture, confocal microscopy, coherence scanning interferometry, comparison of instruments, topography measurement noise, step height repeatability

Klíčová slova v angličtině

surface texture, confocal microscopy, coherence scanning interferometry, comparison of instruments, topography measurement noise, step height repeatability

Autoři

HARČARÍK, M.; JANKOVÝCH, R.

Rok RIV

2018

Vydáno

13.12.2017

Nakladatel

MM (Modern Machinery) Science Journal

Místo

Praha

ISSN

1805-0476

Periodikum

MM Science Journal

Svazek

2017

Číslo

5

Stát

Česká republika

Strany od

2030

Strany do

2034

Strany počet

5

URL

http://doi.org./10.17973/MMSJ.2017_12_201727

BibTex

@article{BUT142924,
  author="Matej {Harčarík} and Róbert {Jankových}",
  title="NOISE AND STEP HEIGHT PERFORMANCE OF SELECTED OPTICAL SURFACE MEASURING INSTRUMENTS",
  journal="MM Science Journal",
  year="2017",
  volume="2017",
  number="5",
  pages="2030--2034",
  doi="10.17973/MMSJ.2017\{_}12\{_}201781",
  issn="1803-1269",
  url="http://doi.org./10.17973/MMSJ.2017_12_201727"
}