Detail publikačního výsledku

Nanosensor array systems based on single functional wires selectively integrated and their sensing properties to C2H6O and NO2

CHMELA, O.; SADÍLEK, J.; SAMÀ, J.; ROMANO-RODRIGUEZ, A.; VALLEJOS VARGAS, S.; HUBÁLEK, J.

Originální název

Nanosensor array systems based on single functional wires selectively integrated and their sensing properties to C2H6O and NO2

Anglický název

Nanosensor array systems based on single functional wires selectively integrated and their sensing properties to C2H6O and NO2

Druh

Stať ve sborníku v databázi WoS či Scopus

Originální abstrakt

Nanosensors systems comprised of an array of parallel-connected single-nanowires across electrodes with finger-widths, closely related to the diameter of gas sensitive WO3 nanowire are developed. The processing steps for the fabrication of these systems include electron-beam lithography, direct writing laser lithography, metallization, etching, dielectrophoresis, and aerosol assisted chemical vapour deposition, among others. The functionality of these systems in resistive configuration towards ethanol and nitrogen dioxide is evaluated. Results indicate higher sensor responses at 250°C and less signal to noise by applying constant currents of 50 nA. For these conditions, the sensor systems demonstrate reproducible responses to each analyte, with higher response to low concentrations of nitrogen dioxide (0.2, 1, 2.5 ppm), as opposed to ethanol (2.5, 10, 100 ppm), and in line with the literature.

Anglický abstrakt

Nanosensors systems comprised of an array of parallel-connected single-nanowires across electrodes with finger-widths, closely related to the diameter of gas sensitive WO3 nanowire are developed. The processing steps for the fabrication of these systems include electron-beam lithography, direct writing laser lithography, metallization, etching, dielectrophoresis, and aerosol assisted chemical vapour deposition, among others. The functionality of these systems in resistive configuration towards ethanol and nitrogen dioxide is evaluated. Results indicate higher sensor responses at 250°C and less signal to noise by applying constant currents of 50 nA. For these conditions, the sensor systems demonstrate reproducible responses to each analyte, with higher response to low concentrations of nitrogen dioxide (0.2, 1, 2.5 ppm), as opposed to ethanol (2.5, 10, 100 ppm), and in line with the literature.

Klíčová slova

NOx ; Nanosensors ; Sensors ; Lithography ; Bioalcohols ; Chemical vapor deposition ; Dielectrophoresis ; Electrodes ; Electron beams ; Etching

Klíčová slova v angličtině

NOx ; Nanosensors ; Sensors ; Lithography ; Bioalcohols ; Chemical vapor deposition ; Dielectrophoresis ; Electrodes ; Electron beams ; Etching

Autoři

CHMELA, O.; SADÍLEK, J.; SAMÀ, J.; ROMANO-RODRIGUEZ, A.; VALLEJOS VARGAS, S.; HUBÁLEK, J.

Rok RIV

2022

Vydáno

20.06.2017

Nakladatel

SPIE Nanotechnology VIII

Místo

Barcelona, Spain

ISBN

9781510609976

Kniha

Proc. SPIE 10248, Nanotechnology VIII

Edice

Volume 10248

ISSN

0277-786X

Periodikum

Proceedings of SPIE

Svazek

10248

Číslo

102480F-1

Stát

Spojené státy americké

Strany od

1

Strany do

7

Strany počet

7

BibTex

@inproceedings{BUT136430,
  author="CHMELA, O. and SADÍLEK, J. and SAMÀ, J. and ROMANO-RODRIGUEZ, A. and VALLEJOS VARGAS, S. and HUBÁLEK, J.",
  title="Nanosensor array systems based on single functional wires selectively integrated and their sensing properties to C2H6O and NO2",
  booktitle="Proc. SPIE  10248, Nanotechnology VIII",
  year="2017",
  series="Volume 10248",
  journal="Proceedings of SPIE",
  volume="10248",
  number="102480F-1",
  pages="1--7",
  publisher="SPIE Nanotechnology VIII",
  address="Barcelona, Spain",
  doi="10.1117/12.2265000",
  isbn="9781510609976",
  issn="0277-786X"
}