Detail publikace

Aerosol assisted chemical vapour deposition of surface-modified tungsten oxide nanostructures: processing and application

VALLEJOS VARGAS, S. Figueras E., Gracia, I. Blackman, C. Stoycheva, T. Annanouch, F. Llobet, E. Cané, C

Originální název

Aerosol assisted chemical vapour deposition of surface-modified tungsten oxide nanostructures: processing and application

Anglický název

Aerosol assisted chemical vapour deposition of surface-modified tungsten oxide nanostructures: processing and application

Jazyk

en

Originální abstrakt

In this work, we used AACVD to synthesize non-modified and modified tungsten oxide NSs, demonstrating that synthesis, functionalization and integration of these structures into microsystem can take place in a single processing step. These NSs were integrated in a single-step deposition via vapour solid mechanism, without the use of pre-grown catalysts, with either MEMS- or polymer-based devices, showing the compatibility of AACVD with microelectronics manufacturing processes. The microsensors fabricated using this method were validated towards various gaseous species, including hydrogen, ethanol and carbon monoxide, showing satisfactory responses. The sensors based on modified tungsten oxide NSs revealed enhanced properties compared to intrinsic tungsten oxide NSs, particularly platinum NPs modified tungsten oxide show better performance to hydrogen. In addition, tungsten oxide NSs, grown on polymeric- and MEMS-based sensor platforms, revealed comparable sensor behavior, with similar response and recovery times to hydrogen (Figure 4b).

Anglický abstrakt

In this work, we used AACVD to synthesize non-modified and modified tungsten oxide NSs, demonstrating that synthesis, functionalization and integration of these structures into microsystem can take place in a single processing step. These NSs were integrated in a single-step deposition via vapour solid mechanism, without the use of pre-grown catalysts, with either MEMS- or polymer-based devices, showing the compatibility of AACVD with microelectronics manufacturing processes. The microsensors fabricated using this method were validated towards various gaseous species, including hydrogen, ethanol and carbon monoxide, showing satisfactory responses. The sensors based on modified tungsten oxide NSs revealed enhanced properties compared to intrinsic tungsten oxide NSs, particularly platinum NPs modified tungsten oxide show better performance to hydrogen. In addition, tungsten oxide NSs, grown on polymeric- and MEMS-based sensor platforms, revealed comparable sensor behavior, with similar response and recovery times to hydrogen (Figure 4b).

Dokumenty

BibTex


@proceedings{BUT110872,
  author="Stella {Vallejos Vargas}",
  title="Aerosol assisted chemical vapour deposition of surface-modified tungsten oxide nanostructures: processing and application",
  annote="In this work, we used AACVD to synthesize non-modified and modified tungsten oxide NSs, demonstrating that synthesis, functionalization and integration of these structures into microsystem can take place in a single processing step. 
These NSs were integrated in a single-step deposition via vapour solid mechanism, without the use of pre-grown catalysts, with either MEMS- or polymer-based devices, showing the compatibility of AACVD with microelectronics manufacturing processes. The microsensors fabricated using this method were validated towards various gaseous species, including hydrogen, ethanol and carbon monoxide, showing satisfactory responses. The sensors based on modified tungsten oxide NSs revealed enhanced properties compared to intrinsic tungsten oxide NSs, particularly platinum NPs modified tungsten oxide show better performance to hydrogen. In addition, tungsten oxide NSs, grown on polymeric- and MEMS-based sensor platforms, revealed comparable sensor
behavior, with similar response and recovery times to hydrogen (Figure 4b).",
  chapter="110872",
  year="2014",
  month="november",
  type="conference proceedings"
}