Detail publikačního výsledku

SEM Characterization of Carbon Nanotubes Based Active Layers of Chemical Sensors

KNÁPEK, A.; MIKA, F.; PRÁŠEK, J.; MAJZLÍKOVÁ, P.

Originální název

SEM Characterization of Carbon Nanotubes Based Active Layers of Chemical Sensors

Anglický název

SEM Characterization of Carbon Nanotubes Based Active Layers of Chemical Sensors

Druh

Stať ve sborníku v databázi WoS či Scopus

Originální abstrakt

Characterization method for active layers for microelectrodes of electrochemical and gas sensors using scanning electron microscopy (SEM) is presented. In order to achieve maximum sensitivity and selectivity of the sensor, it is necessary to obtain precise knowledge of electrode's surface. Characterization was made using FEI Magellan SEM equipped with TLD secondary electron (SE) and CBS back-scattered electron (BSE) detectors, Energy-dispersive X-ray spectroscopy (EDS) and beam deceleration system. SEM at lower energies offers several advantages, among them the most important are: increase of material contrast, high ratio SE, BSE signal and noise, smaller interaction volume and elimination of charging effects.

Anglický abstrakt

Characterization method for active layers for microelectrodes of electrochemical and gas sensors using scanning electron microscopy (SEM) is presented. In order to achieve maximum sensitivity and selectivity of the sensor, it is necessary to obtain precise knowledge of electrode's surface. Characterization was made using FEI Magellan SEM equipped with TLD secondary electron (SE) and CBS back-scattered electron (BSE) detectors, Energy-dispersive X-ray spectroscopy (EDS) and beam deceleration system. SEM at lower energies offers several advantages, among them the most important are: increase of material contrast, high ratio SE, BSE signal and noise, smaller interaction volume and elimination of charging effects.

Klíčová slova

chemical sensors, MWCNTs active layer, SEM, characterization

Klíčová slova v angličtině

chemical sensors, MWCNTs active layer, SEM, characterization

Autoři

KNÁPEK, A.; MIKA, F.; PRÁŠEK, J.; MAJZLÍKOVÁ, P.

Rok RIV

2015

Vydáno

07.05.2014

Nakladatel

Institute of Electrical and Electronics Engineers Inc.

ISBN

978-1-4799-4455-2

Kniha

37th International Spring Seminar on Electronics Technology

Edice

1

Strany od

361

Strany do

364

Strany počet

4

BibTex

@inproceedings{BUT109741,
  author="Alexandr {Knápek} and Filip {Mika} and Jan {Prášek} and Petra {Majzlíková}",
  title="SEM Characterization of Carbon Nanotubes Based Active Layers of Chemical Sensors",
  booktitle="37th International Spring Seminar on Electronics Technology",
  year="2014",
  series="1",
  number="1",
  pages="361--364",
  publisher="Institute of Electrical and Electronics Engineers Inc.",
  doi="10.1109/ISSE.2014.6887625",
  isbn="978-1-4799-4455-2"
}