The aim of this project is the study of a novel structure for graphene monolayer physical properties control and its characterization. The properties are controlled by strain of MEMS/NEMS piezoelectric resonator and by electric field of FET structure. This approach of fabrication CMOS-compatible and biocompatible tunable frequency-modulated piezoelectric MEMS/NEMS resonators with graphene monolayer should be very useful in many fields for molecule level detection. There is no limit to measure concentration in units of ppb in terms of structure design.

FEKT/STI-J-17-4136

Czech

Gablech Imrich, Ing., Ph.D. - principal person responsible
Hubálek Jaromír, prof. Ing., Ph.D. - fellow researcher
Pekárek Jan, doc. Ing., Ph.D. - fellow researcher
Somer Jakub, Ing., PhD. - fellow researcher

Central European Institute of Technology BUT
- responsible department (13.3.2017 - not assigned)
Department of Microelectronics
- internal (1.1.2017 - 31.12.2017)
Faculty of Electrical Engineering and Communication
- internal (1.1.2017 - 31.12.2017)
Central European Institute of Technology BUT
- beneficiary (1.1.2017 - 31.12.2017)

GABLECH, I.; SOMER, J.; FOHLEROVÁ, Z.; KURDÍK, S.; PEKÁREK, J.; FECKO, P.; SVATOŠ, V.; HUBÁLEK, J.; NEUŽIL, P.: Utopené mikrokanály pro mikrofluidiku. URL: http://www.umel.feec.vutbr.cz/LabSensNano/products.aspx?id=134. (Funkční vzorek)
Detail

GABLECH, I.; PEKÁREK, J.; KLEMPA, J.; SVATOŠ, V.; SAJEDI-MOGHADDAM, A.; NEUŽIL, P.; PUMERA, M. Monoelemental 2D Materials-based Field Effect Transistors for Sensing and Biosensing: Phosphorene, Antimonene, Arsenene, Silicene, and Germanene go beyond Graphene. TRAC-TRENDS IN ANALYTICAL CHEMISTRY, 2018, vol. 105, no. NA, p. 251-262. ISSN: 0165-9936.
Detail

GABLECH, I.; SVATOŠ, V.; CAHA, O.; DUBROKA, A.; PEKÁREK, J.; KLEMPA, J.; NEUŽIL, P.; SCHNEIDER, M.; ŠIKOLA, T. Preparation of high-quality stress-free (001) aluminum nitride thin film using a dual kaufman ion-beam source setup. Thin Solid Films, 2019, vol. 670, no. NA, p. 105-112. ISSN: 0040-6090.
Detail

GABLECH, I.; SOMER, J.; FOHLEROVÁ, Z.; SVATOŠ, V.; PEKÁREK, J.; KURDÍK, S.; FENG, J.; FECKO, P.; PODEŠVA, P.; HUBÁLEK, J.; NEUŽIL, P. Fabrication of buried microfluidic channels with observation windows using femtosecond laser photoablation and parylene-C coating. Microfluidics and Nanofluidics, 2018, vol. 22, no. 9, p. 1-7. ISSN: 1613-4990.
Detail

GABLECH, I.; CAHA, O.; SVATOŠ, V.; PRÁŠEK, J.; PEKÁREK, J.; NEUŽIL, P.; ŠIKOLA, T. Preparation of [001] Oriented Titanium Thin Film for MEMS Applications by Kaufman Ion-beam Source. In Proceedings of 9 th International conference Nanocon 2017. 1. Ostrava: Tanger, 2018. p. 117-122. ISBN: 978-80-87294-59-8.
Detail

GABLECH, I.; CAHA, O.; SVATOŠ, V.; PEKÁREK, J.; NEUŽIL, P.; ŠIKOLA, T. Stress-free deposition of [001] preferentially oriented titanium thin film by Kaufman ion-beam source. Thin Solid Films, 2017, vol. 638, no. NA, p. 57-62. ISSN: 0040-6090.
Detail

GABLECH, I.; PEKÁREK, J.; KLEMPA, J.; VYROUBAL, P.; SVATOŠ, V.; NEUŽIL, P. A New Method for 2D Materials Properties Modulation by Controlled Induced Mechanical Strain. In Proceedings, Eurosensors 2018. Proceedings. Basel, Switzerland: MDPI, 2018. no. 13, p. 1-5. ISSN: 2504-3900.
Detail

Responsibility: Gablech Imrich, Ing., Ph.D.