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Bachelor's Thesis
Author of thesis: Ing. Michal Gryga, Ph.D.
Acad. year: 2015/2016
Supervisor: Ing. Pavel Procházka, Ph.D.
Reviewer: Ing. Zuzana Lišková, Ph.D.
This bachelor thesis is focused on the measurement of the transport properties of graphene, which was produced by chemical vapor deposition (CVD) method on a copper foil and subsequently transferred onto a silicon substrate covered by 280 nm of silicon dioxide. In this work we studied an influence of different types of copper etchants and influence of plasma cleaning of silicon substrates prior to the graphene deposition.
CVD, graphene transfer, copper etching, plasma cleaning, FET.
Date of defence
23.06.2016
Result of the defence
Defended (thesis was successfully defended)
Grading
A
Language of thesis
Czech
Faculty
Fakulta strojního inženýrství
Department
Institute of Physical Engineering
Study programme
Applied Sciences in Engineering (B3901-3)
Field of study
Physical Engineering and Nanotechnology (B-FIN)
Composition of Committee
prof. RNDr. Tomáš Šikola, CSc. (předseda) prof. RNDr. Miroslav Liška, DrSc. (místopředseda) prof. RNDr. Bohumila Lencová, CSc. (člen) prof. RNDr. Petr Dub, CSc. (člen) prof. RNDr. Radim Chmelík, Ph.D. (člen) prof. RNDr. Jiří Spousta, Ph.D. (člen) prof. Ing. Ivan Křupka, Ph.D. (člen) prof. RNDr. Pavel Zemánek, Ph.D. (člen) RNDr. Antonín Fejfar, CSc. (člen) doc. Ing. Radek Kalousek, Ph.D. (člen)
Supervisor’s reportIng. Pavel Procházka, Ph.D.
Grade proposed by supervisor: A
Reviewer’s reportIng. Zuzana Lišková, Ph.D.
Grade proposed by reviewer: B
Responsibility: Mgr. et Mgr. Hana Odstrčilová