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Bachelor's Thesis
Author of thesis: Ing. Jan Hudeček
Acad. year: 2014/2015
Supervisor: Ing. Petr Viewegh, Ph.D.
Reviewer: Ing. Michal Pavera, Ph.D.
The submitted bachelor’s thesis are dealed with concept and design of holder of new palette, which is determine for deposition equipment, which belongs to institue of physical engineering and which is called as Kaufmann. Introductory chapters of bachelor’s thesis deals about possibilities of production of thin films, ways of growth of thin films and introduction to vakuum physics. Next chapter is given to current deposition and current deposition equipment Kaufmann. In the next chapter are descriptions of construct solution of holder of new palette and construct solution of palette. The last chapter is given to calibration and optimalization of deposition with new palette.
Ion sputtering, IBAD, IBS, thin film deposition
Date of defence
24.06.2015
Result of the defence
Defended (thesis was successfully defended)
Grading
E
Language of thesis
Czech
Faculty
Fakulta strojního inženýrství
Department
Institute of Physical Engineering
Study programme
Applied Sciences in Engineering (B3901-3)
Field of study
Physical Engineering and Nanotechnology (B-FIN)
Composition of Committee
prof. RNDr. Tomáš Šikola, CSc. (předseda) prof. RNDr. Miroslav Liška, DrSc. (místopředseda) prof. RNDr. Bohumila Lencová, CSc. (člen) prof. RNDr. Jiří Komrska, CSc. (člen) prof. RNDr. Petr Dub, CSc. (člen) prof. RNDr. Radim Chmelík, Ph.D. (člen) prof. RNDr. Jiří Spousta, Ph.D. (člen) prof. Ing. Ivan Křupka, Ph.D. (člen) prof. RNDr. Pavel Zemánek, Ph.D. (člen) RNDr. Antonín Fejfar, CSc. (člen)
Supervisor’s reportIng. Petr Viewegh, Ph.D.
Grade proposed by supervisor: E
Reviewer’s reportIng. Michal Pavera, Ph.D.
Grade proposed by reviewer: E
Responsibility: Mgr. et Mgr. Hana Odstrčilová