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Bachelor's Thesis
Author of thesis: Ing. Miroslav Knotek
Acad. year: 2012/2013
Supervisor: Ing. Stanislav Voborný, Ph.D.
Reviewer: doc. Ing. Jindřich Mach, Ph.D.
This bachelor's thesis deals with a fabrication of gallium nitride (GaN) thin films on silicon substrates, which were structured by electron beam lithography. In thesis, different resists for selective growth of nanostructures at elevated temperatures are examined.
Gallium nitride, electron beam lithography, deposition thin films, selective growth, molecular epitaxy, positive and negative resists.
Date of defence
19.06.2013
Result of the defence
Defended (thesis was successfully defended)
Grading
B
Language of thesis
Czech
Faculty
Fakulta strojního inženýrství
Department
Institute of Physical Engineering
Study programme
Applied Sciences in Engineering (B3901-3)
Field of study
Physical Engineering and Nanotechnology (B-FIN)
Composition of Committee
prof. RNDr. Tomáš Šikola, CSc. (předseda) prof. RNDr. Miroslav Liška, DrSc. (místopředseda) prof. RNDr. Bohumila Lencová, CSc. (člen) prof. RNDr. Jiří Komrska, CSc. (člen) prof. RNDr. Petr Dub, CSc. (člen) prof. RNDr. Radim Chmelík, Ph.D. (člen) prof. RNDr. Jiří Spousta, Ph.D. (člen) prof. Ing. Ivan Křupka, Ph.D. (člen) prof. RNDr. Pavel Zemánek, Ph.D. (člen) RNDr. Antonín Fejfar, CSc. (člen)
Supervisor’s reportIng. Stanislav Voborný, Ph.D.
Grade proposed by supervisor: A
Reviewer’s reportdoc. Ing. Jindřich Mach, Ph.D.
Grade proposed by reviewer: B
Responsibility: Mgr. et Mgr. Hana Odstrčilová