Přístupnostní navigace
E-application
Search Search Close
Master's Thesis
Author of thesis: Ing. Michal Pavera, Ph.D.
Acad. year: 2010/2011
Supervisor: Ing. Michal Urbánek, Ph.D.
Reviewer: Ing. Jaroslav Sobota, CSc.
This diploma thesis deals with the automation of the deposition process by ion beam sputtering and ion beam assisted deposition. This work contains drawings of mechanical adjustments of the deposition chamber designed to control shutter and rotation of the target using stepper motors. There are presented ways to control stepper motors and troubleshoot their exact settings. Another task is to design a system for computer control of the deposition process. There are discussed ways to control the ion sources, pressure meter, flow meter and thickness meter, and their connection to a PC via RS-232 and analog-digital converters. It is also designed control program in LabVIEW, which allow automated multilayer deposition. Last part of the thesis deals with testing automatic deposition and results are commented.
Ion sputtering, IBAD, IBS, thin film deposition, LabVIEW.
Date of defence
20.06.2011
Result of the defence
Defended (thesis was successfully defended)
Grading
B
Language of thesis
Czech
Faculty
Fakulta strojního inženýrství
Department
Institute of Physical Engineering
Study programme
Applied Sciences in Engineering (N3901-2)
Field of study
Physical Engineering and Nanotechnology (M-FIN)
Composition of Committee
prof. RNDr. Tomáš Šikola, CSc. (předseda) prof. RNDr. Miroslav Liška, DrSc. (místopředseda) prof. RNDr. Bohumila Lencová, CSc. (člen) doc. RNDr. Josef Kuběna, CSc. (člen) prof. RNDr. Jiří Komrska, CSc. (člen) prof. RNDr. Pavel Zemánek, Ph.D. (člen) prof. RNDr. Petr Dub, CSc. (člen) prof. RNDr. Radim Chmelík, Ph.D. (člen) prof. Ing. Ivan Křupka, Ph.D. (člen) prof. RNDr. Jiří Spousta, Ph.D. (člen) RNDr. Antonín Fejfar, CSc. (člen)
Supervisor’s reportIng. Michal Urbánek, Ph.D.
Grade proposed by supervisor: B
Reviewer’s reportIng. Jaroslav Sobota, CSc.
Grade proposed by reviewer: B
Responsibility: Mgr. et Mgr. Hana Odstrčilová