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Master's Thesis
Author of thesis: Ing. Jan Krpenský
Acad. year: 2021/2022
Supervisor: doc. Ing. Andrea Konečná, Ph.D.
Reviewer: Ing. Jaroslav Maniš
Vanadium dioxide (VO2) has attracted increasing attention over the past decades due to its metal-insulator phase transition at temperature around 68 °C. This phase change is accompanied by lattice change from monoclinic (dielectric) to tetragonal (metal), lattice shrinking in the metallic state, and stark difference in the infrared transmittance between both phases. However, fabrication of VO2 thin films can be challenging due to other possible stoichiometric configurations, such as VO, V2O3, or V2O5. Many fabrication techniques have been used in recent years, where optimized fabrication process produces VxOy in the desired stoichiometry of VO2. In this Thesis, a summary of three deposition techniques suitable for the deposition of VO2 thin films is made and the process of creating thin samples (lamellae) suitable for study in the transmission electron microscopy (TEM) via focused ion beam (FIB) is described. Utilizing TEM with in-situ heating for characterization of VO2 samples produces valuable information on the microstructure of VO2 both below and above the transition temperature. In addition, electron energy-loss spectroscopy gives precious insight into the changing of different stoichiometries of VO2 in correlation to the thickness of the examined sample, near the sample edge in particular.
Vanadium dioxide, FIB, lamella, TEM, EELS
Date of defence
13.06.2022
Result of the defence
Defended (thesis was successfully defended)
Grading
A
Process of defence
Po otázkách oponenta bylo dále diskutováno Nejistota v experimentálním určení posuvu píků. Měření teploty lamely. Student na otázky odpověděl.
Language of thesis
English
Faculty
Fakulta strojního inženýrství
Department
Institute of Physical Engineering
Study programme
Physical Engineering and Nanotechnology (N-FIN-P)
Composition of Committee
prof. RNDr. Tomáš Šikola, CSc. (předseda) prof. RNDr. Jiří Spousta, Ph.D. (místopředseda) prof. RNDr. Pavel Zemánek, Ph.D. (člen) prof. Mgr. Dominik Munzar, Dr. (člen) doc. Mgr. Adam Dubroka, Ph.D. (člen) prof. RNDr. Petr Dub, CSc. (člen) prof. RNDr. Bohumila Lencová, CSc. (člen) prof. RNDr. Miroslav Liška, DrSc. (člen) prof. RNDr. Jiří Petráček, Dr. (člen) prof. RNDr. Radim Chmelík, Ph.D. (člen) doc. Ing. Radek Kalousek, Ph.D. (člen) prof. Ing. Miroslav Kolíbal, Ph.D. (člen) doc. Ing. Stanislav Průša, Ph.D. (člen)
Supervisor’s reportdoc. Ing. Andrea Konečná, Ph.D.
Grade proposed by supervisor: A
Reviewer’s reportIng. Jaroslav Maniš
Grade proposed by reviewer: A
Responsibility: Mgr. et Mgr. Hana Odstrčilová