Course detail
Microsensors and Microelectromechanical Systems
FEKT-BPC-MMSAcad. year: 2021/2022
Introduction into microsensors, general calsification and parameters, and microelectromechanical systems (MEMS). Fundamentals of microelectronic technologies and MEMS technology. Fundamentals of phenomenas in materials including semiconductors and their exploiting in sensors. Resistive, capacitive and inductance microsensors including MEMS solution (position, pressure, temperature, acceleration, ....). Magnetoelectric sensors and Hall's probes. Generating sensors based on thermoelectric, piezoelectric, and inductive principle. Optical and CCD sensors. Light emission sensor generators. Chemical and biochemical sensors (conductometric, pH sensors, lambda probe, enzymatic sensors, ...). New trends in microsensors and MEMS.
Language of instruction
Number of ECTS credits
Mode of study
Guarantor
Department
Learning outcomes of the course unit
Prerequisites
Co-requisites
Planned learning activities and teaching methods
It is including:
lectures using form of technical seminary;
self-reliant practice laboratory exercise including preparation and elaboration of report;
using LMS Moodle, practical demonstration, visit of research laboratory LABSENSNANO.
Assesment methods and criteria linked to learning outcomes
Course curriculum
2. Fundametals of microelectronics technology
3. MicroElectroMechanical Systems (MEMS
4. Resistive sensors
5. Capacitive sensors
6. Inductance sensors
7. Generating sensors
8. Semicoductive sensors
9. Optical sensors
10. Special sensors
11. Chcemical sensors and biosensors
Work placements
Aims
Specification of controlled education, way of implementation and compensation for absences
Recommended optional programme components
Prerequisites and corequisites
Basic literature
HUBÁLEK, J.; PRÁŠEK, J.; PEKÁRKOVÁ, J; BENDOVÁ, M.; DRBOHLAVOVÁ, J.; MAJZLÍKOVÁ, P. Microsensors and Microelectromechanical Systems. Brno: 2015. (EN)
Recommended reading
Julian W. Gardner; Microsensors : Principles and Applications. John Wiley & Sons Inc., 2020, ISBN 0470850434 (EN)
Elearning
Classification of course in study plans
Type of course unit
Lecture
Teacher / Lecturer
Syllabus
Fundaments of microelectronic technologies. Classification of microelectronic technologies, technologies of thin and thick films, fundaments of semiconductor technologies.
Introduction into semiconductors and their exploiting in sensorics.
Resistive sensors. General properties, model of electric schematic diagram, classification of resistive sensors, essential description of microsensors (gauges, thermistors, posistors, ...).
Capacitive microsensors. General parameters, model of electric schematic diagram, classification of capacitive sensors.
Hall sensors. Physical principle, materials for Hall sensors.
Piezoelectric sensors. Physical principle, materials for piezoelectric sensors, design and application.
CCD sensors. Physical principle, General parameters and application.
Light emission sensor generators.
Chemical sensors. Physical principle. General parameters and application. Classification of chemical sensors, description (conductometric, pH sensors, ...).
Special types of sensors.
Micromechanical systems. General parameters and application. Manufacturing of micromechanical systems.
New trends in microsensorics and micromechanical systems.
Laboratory exercise
Teacher / Lecturer
Syllabus
Practical fundamental of microelectronic technology, Laboratory project
Measurement of position
Measurement of temperatures (resistance)
Measurement of temperatures (thermoelectric)
Measurement of pressure
Measurement of flow
Measurement of velocity and rotation speed
Measurement of light
Measurement with chemical sensors
Special sensors
Consultations by lab project
Free topic
Elearning