Course detail

Electrovacuum instruments and cryogenic technique

FEKT-KEPTAcad. year: 2011/2012

Gas, steam, pressure. Ideal gas laws. Principles of kinetic theory of gases. Pumping processes. Special electronic circuits for electro-vacuum devices. Devices based on measuring of macroscopic properties of gas (vacuometers,
mass flowmeters), on control of charged particles trajectories (mass spectrometers, electron microscopes) and on exploitation of cryogenic technology (cryogenic and cryosorption pumps). Devices based on exploitation of gas discharges ( plasma deposition and plasma etching devices, ionic pumps).

Language of instruction

Czech

Number of ECTS credits

5

Mode of study

Not applicable.

Guarantor

prof. Ing. Jaroslav Boušek, CSc.

Department

Department of Microelectronics (UMEL)

Learning outcomes of the course unit

Basic skills and orientation in vacuum technology.

Prerequisites

The subject knowledge on the secondary school level is required.

Co-requisites

Not applicable.

Planned learning activities and teaching methods

Teaching methods depend on the type of course unit as specified in the article 7 of BUT Rules for Studies and Examinations.

Assesment methods and criteria linked to learning outcomes

Laboratory practicum - 30 points; minimum 20 points.
Final exam – 70 points; minimum 30 points.

Course curriculum

Gas, vapour, pressure. Basic principles and laws for the ideal gases. Kinetic theory of gases - basic principles. Mean free path of gas molecules. Thermal velocity of gas molecules, Maxwell-Boltzmann statistic.
Pumping processes. Gas transport through vacuum pipes, gas conductance of vacuum pipes. Influence of leakage and desorption. Surface processes. Different types of gas transport - turbulent, viscose, molecular and effusion.
Basic principles of gas transport - transport and getter pumps. Mechanical pumps, Roots blowers, turbo pumps. Diffusion pumps. Getter pumps.
The basic principles of vacuum equipment design. Basic technologies in the vacuum equipment production.
Electronic circuits for electro-vacuum instruments. High voltage power sources, high frequency generators. Circuits for very low current measurement. Circuits for the potential isolation, electronic protection circuits.
Devices based on gas volume and gas particle properties. Thermocouple gauges, Pirani gauges, mass flow-meters. Ion gauges.
Devices based on trajectory control of charged particles thermal emission, ionization, electromagnetic and electrostatic deflection.
Devices based on trajectory control of charged particles mass spectrometers.
Devices based on trajectory control of charged particles electron microscopes.
Devices based on usage of cryogenic technology - cryogenic technology in electro-vacuum technology, cryogenic and cryosorption pumps.
Devices based on usage of cryogenic technology - superconductivity, exploitation of superconductivity.
Devices based on usage of gas dicharges - types of discharges, examples of their exploitation. Plasma parameters, measurement of plasma parameters.
Devices based on usage of gas dicharges - cathode sputtering, plasma deposition from gas phase, plasma etching. Titanium discharge pump, ionic pump.

Work placements

Not applicable.

Aims

Acquirement of the knowledges about modern vacuum technics for use in electronics, in electrotechnical and mechanical industry

Specification of controlled education, way of implementation and compensation for absences

Laboratory practicum. Numerical practicum.

Recommended optional programme components

Not applicable.

Prerequisites and corequisites

Not applicable.

Basic literature

Fikes,L.: Fyzika nízkých tlaků, SNTL, Praha, 1991. (CS)
Pátý,L.: Vakuová technika, ČVUT, Praha, 1990. (CS)
Grozskowski J.: Technika vysokého vakua, SNTL, Praha, 1981 (CS)

Recommended reading

Not applicable.

Classification of course in study plans

  • Programme EEKR-BK Bachelor's

    branch BK-MET , 3. year of study, summer semester, optional specialized

Type of course unit

 

Lecture

26 hours, optionally

Teacher / Lecturer

prof. Ing. Jaroslav Boušek, CSc.

Syllabus

Gas, vapour, pressure. Basic principles and laws for the ideal gases. Kinetic theory of gases - basic principles. Mean free path of gas molecules. Thermal velocity of gas molecules, Maxwell-Boltzmann statistic.
Pumping processes. Gas transport through vacuum pipes, gas conductance of vacuum pipes. Influence of leakage and desorption. Surface processes. Different types of gas transport - turbulent, viscose, molecular and effusion.
Basic principles of gas transport - transport and getter pumps. Mechanical pumps, Roots blowers, turbo pumps. Diffusion pumps. Getter pumps.
The basic principles of vacuum equipment design. Basic technologies in the vacuum equipment production.
Electronic circuits for electro-vacuum instruments. High voltage power sources, high frequency generators. Circuits for very low current measurement. Circuits for the potential isolation, electronic protection circuits.
Devices based on gas volume and gas particle properties. Thermocouple gauges, Pirani gauges, mass flow-meters. Ion gauges.
Devices based on trajectory control of charged particles thermal emission, ionization, electromagnetic and electrostatic deflection.
Devices based on trajectory control of charged particles mass spectrometers.
Devices based on trajectory control of charged particles electron microscopes.
Devices based on usage of cryogenic technology - cryogenic technology in electro-vacuum technology, cryogenic and cryosorption pumps.
Devices based on usage of cryogenic technology - superconductivity, exploitation of superconductivity.
Devices based on usage of gas dicharges - types of discharges, examples of their exploitation. Plasma parameters, measurement of plasma parameters.
Devices based on usage of gas dicharges - cathode sputtering, plasma deposition from gas phase, plasma etching. Titanium discharge pump, ionic pump.

Fundamentals seminar

12 hours, compulsory

Teacher / Lecturer

prof. Ing. Jaroslav Boušek, CSc.

Syllabus

Gas, vapour, pressure, Measurement units and their relation. Laws for the ideal gases. Kinetic theory of gases. basic principles. Relation between pressure, concentration and temperature of gas.
The thermal velocity of the gas molecules, Maxwell-Boltzmann statistic. The mean free path of gas molecules. Volume processes and transport of gas, diffusion, viscosity of gas, thermal conductivity of gas.
The gas transport through the vacuum pipes. Gas conductance of Vacuum pipes. Ohms law in gas transport. The volume and mass flow of the gas. The different mechanism of the gas transport - turbulent, viscose, molecular, effusion.
The limit pressure of the vacuum equipment. Pumping speed of the vacuum pumps and its measurement, the exhaust time. The influence of leakage and desorption.
The surface processes, adsorption, desorption, monomolecular and multimolecular layers, basic adsorption isotherms, saturated vapour pressure.
The basic principles of vacuum equipment design.

Laboratory exercise

14 hours, compulsory

Teacher / Lecturer

prof. Ing. Jaroslav Boušek, CSc.

Syllabus

Opening laboratory exercise, acquaintance with laboratory, work safety at vacuum technology.
Measurement of pumping velocity of pumping units.
Calibration of thermocouple gauge.
Measurement of vacuum conductivity of pipes.
Measurement of gas flow, calibration of flowmeter.
Materials and production methods used in vacuum technology.
Design principles of vacuum devices.
Searching of vacuum leakages.
Vacuum evaporation.
Cathode sputtering.