Detail publikačního výsledku

Comparison of calculated, simulated and measured signal amplification in a variable pressure SEM

NEDĚLA, V.; KONVALINA, I.; LENCOVÁ, B.; ZLÁMAL, J.

Original Title

Comparison of calculated, simulated and measured signal amplification in a variable pressure SEM

English Title

Comparison of calculated, simulated and measured signal amplification in a variable pressure SEM

Type

Peer-reviewed article not indexed in WoS or Scopus

Original Abstract

This paper presents computed dependencies of signal amplification of detected electrons on the water vapor pressure in a variable pressure SEM using the EOD software equipped with a Monte Carlo plug-in. We analyze the amplification at selected energies of signal electrons going through a high-pressure water vapor and total signal amplification by including a realistic simulation of the secondary emission from sample. The results are compared with experimental measurements and the dependencies of published analytical models.

English abstract

This paper presents computed dependencies of signal amplification of detected electrons on the water vapor pressure in a variable pressure SEM using the EOD software equipped with a Monte Carlo plug-in. We analyze the amplification at selected energies of signal electrons going through a high-pressure water vapor and total signal amplification by including a realistic simulation of the secondary emission from sample. The results are compared with experimental measurements and the dependencies of published analytical models.

Keywords

Electron-gas interactions; Monte Carlo simulations; Signal amplification; Analytical models

Key words in English

Electron-gas interactions; Monte Carlo simulations; Signal amplification; Analytical models

Authors

NEDĚLA, V.; KONVALINA, I.; LENCOVÁ, B.; ZLÁMAL, J.

RIV year

2012

Released

21.07.2011

ISBN

0168-9002

Periodical

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT

Volume

645

Number

1

State

Kingdom of the Netherlands

Pages from

79

Pages to

83

Pages count

5

Full text in the Digital Library

http://hdl.handle.net/

BibTex

@article{BUT72697,
  author="Vilém {Neděla} and Ivo {Konvalina} and Bohumila {Lencová} and Jakub {Zlámal}",
  title="Comparison of calculated, simulated and measured signal amplification in a variable pressure SEM",
  journal="NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT",
  year="2011",
  volume="645",
  number="1",
  pages="79--83",
  issn="0168-9002"
}