Applied result detail

Optický senzor tlaku s MEMS snímací membránou

KADLEC, J.; HELÁN, R.; URBAN, F.; VRBA, R.; VLACH, R.

Original Title

English Title

Optical pressure sensor with MEMS sensing membrane

Type

Functioning sample

Abstract

Optický senzor tlaku s MEMS křemíkovou membránou a základnou z materiálu SIMAX.

Abstract in English

Optical pressure sensor with MEMS sensing membrane and header from SIMAX.

Keywords

Tlakový snímač, optický princip, MEMS membrána

Key words in English

Pressure sensor, optical principle, MEMS membrane

Location

BD Sensors, s.r.o., Buchlovice

Licence fee

Use of the result by another entity is possible without acquiring a license (the result is not licensed)

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