Publication result detail

Analysis of thin films by TOF-LEIS

PRŮŠA, S.; KOLÍBAL, M.; BÁBOR, P.; MACH, J.; ŠIKOLA, T.

Original Title

Analysis of thin films by TOF-LEIS

English Title

Analysis of thin films by TOF-LEIS

Type

Peer-reviewed article not indexed in WoS or Scopus

Original Abstract

In the paper the design and application of a TOF-LEIS instrument built into an UHV complex deposition and analytical apparatus is described. A special attention is aimed at demonstrating the ability of TOF-LEIS to analyse near-to-surface layers of thin films prepared both ex-situ and in-situ. Additionally, the monitoring of diffusion processes close to a sample surface by this technique is presented. It is shown that the broadening of peaks in TOF-LEIS spectra can be attributed to multiple scattering and inelastic losses of ions in deeper layers. As a result of that, the peak width of ultrathin films depends on their thickness.

English abstract

In the paper the design and application of a TOF-LEIS instrument built into an UHV complex deposition and analytical apparatus is described. A special attention is aimed at demonstrating the ability of TOF-LEIS to analyse near-to-surface layers of thin films prepared both ex-situ and in-situ. Additionally, the monitoring of diffusion processes close to a sample surface by this technique is presented. It is shown that the broadening of peaks in TOF-LEIS spectra can be attributed to multiple scattering and inelastic losses of ions in deeper layers. As a result of that, the peak width of ultrathin films depends on their thickness.

Keywords

Time of Flight, TOF, Low energy, Ion Scattering, LEIS, Surfaces

Key words in English

Time of Flight, TOF, Low energy, Ion Scattering, LEIS, Surfaces

Authors

PRŮŠA, S.; KOLÍBAL, M.; BÁBOR, P.; MACH, J.; ŠIKOLA, T.

Released

01.05.2007

ISBN

0587-4246

Periodical

ACTA PHYSICA POLONICA A

Volume

111

Number

3

State

Republic of Poland

Pages from

335

Pages to

341

Pages count

7

BibTex

@article{BUT43454,
  author="Stanislav {Průša} and Miroslav {Kolíbal} and Petr {Bábor} and Jindřich {Mach} and Tomáš {Šikola}",
  title="Analysis of thin films by TOF-LEIS",
  journal="ACTA PHYSICA POLONICA A",
  year="2007",
  volume="111",
  number="3",
  pages="335--341",
  issn="0587-4246"
}