Detail publikačního výsledku

Vacuum micromanipulator upgrading a scanning electron microscope to a new fabrication and characterization tool

NOVÁČEK, Z.; ZEZULKA, L.; KONEČNÝ, M.; PALOUDA, A.; VACEK, M.; KOLOMÝ, Š.; SPOUSTA, J.; SUPALOVÁ, L.; ČERNEK, O.; SPOUSTA, J.; ŠIKOLA, T.

Original Title

Vacuum micromanipulator upgrading a scanning electron microscope to a new fabrication and characterization tool

English Title

Vacuum micromanipulator upgrading a scanning electron microscope to a new fabrication and characterization tool

Type

WoS Article

Original Abstract

A hand-operated micromanipulator extending the capabilities of high-vacuum scanning electron microscopes (SEMs) with optical measurement modes, electrical contacting of structures, and mechanical manipulation was developed. This micromanipulator supports combined four degrees of freedom rotational and sliding movements, achieving positioning accuracy and repeatability to the center of the SEM view-field within the requested ten micrometers. It integrates a manipulator probe or optical fiber that can be easily maneuvered over the sample area inside the SEM chamber. These enable various unique applications, including mechanical manipulation, local electrical probing, cathodoluminescence measurements, local gas injection via photonic crystal optical fiber (PCF), and local thin film heating and evaporation, respectively. Thus, the seamlessly integrated in-house-built micromanipulator facilitates real-time observation and modification of micro- and nanostructures with high precision and versatility, expanding the capabilities of conventional SEMs.

English abstract

A hand-operated micromanipulator extending the capabilities of high-vacuum scanning electron microscopes (SEMs) with optical measurement modes, electrical contacting of structures, and mechanical manipulation was developed. This micromanipulator supports combined four degrees of freedom rotational and sliding movements, achieving positioning accuracy and repeatability to the center of the SEM view-field within the requested ten micrometers. It integrates a manipulator probe or optical fiber that can be easily maneuvered over the sample area inside the SEM chamber. These enable various unique applications, including mechanical manipulation, local electrical probing, cathodoluminescence measurements, local gas injection via photonic crystal optical fiber (PCF), and local thin film heating and evaporation, respectively. Thus, the seamlessly integrated in-house-built micromanipulator facilitates real-time observation and modification of micro- and nanostructures with high precision and versatility, expanding the capabilities of conventional SEMs.

Keywords

Micromanipulator; Scanning electron microscopy; Optical fiber; Cathodoluminescence; Direct laser lithography

Key words in English

Micromanipulator; Scanning electron microscopy; Optical fiber; Cathodoluminescence; Direct laser lithography

Authors

NOVÁČEK, Z.; ZEZULKA, L.; KONEČNÝ, M.; PALOUDA, A.; VACEK, M.; KOLOMÝ, Š.; SPOUSTA, J.; SUPALOVÁ, L.; ČERNEK, O.; SPOUSTA, J.; ŠIKOLA, T.

Released

01.08.2025

Publisher

PERGAMON-ELSEVIER SCIENCE LTD

Location

OXFORD

ISBN

1879-2715

Periodical

Vacuum

Volume

238

Number

114290

State

United Kingdom of Great Britain and Northern Ireland

Pages count

8

URL

https://www.sciencedirect.com/science/article/pii/S0042207X25002805?via%3Dihub

Full text in the Digital Library

http://hdl.handle.net/

BibTex

@article{BUT198114,
  author="Zdeněk {Nováček} and Lukáš {Zezulka} and Martin {Konečný} and Adam {Palouda} and Martin {Vacek} and Štěpán {Kolomý} and Jiří {Spousta} and Linda {Supalová} and Ondrej {Černek} and Jiří {Spousta} and Tomáš {Šikola}",
  title="Vacuum micromanipulator upgrading a scanning electron microscope to a new fabrication and characterization tool",
  journal="Vacuum",
  year="2025",
  volume="238",
  number="114290",
  pages="8",
  doi="10.1016/j.vacuum.2025.114290",
  issn="0042-207X",
  url="https://www.sciencedirect.com/science/article/pii/S0042207X25002805?via%3Dihub"
}