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Master's Thesis
Author of thesis: Ing. Tadeáš Maňka, Ph.D.
Acad. year: 2015/2016
Supervisor: Ing. Mojmír Šerý, Ph.D.
Reviewer: Ing. Martin Antoš, Ph.D.
The aim of this work is to design fully working measuring system for the reactive ion etching system (RIE). The Michelson interfometer, previously developed in Ústav přístrojové techniky, v.v.i., is used in this work. The theoretical part is aimed at description of interferometric methods for precise measuring of length. In next part the etching proces with RIE is described. In practical part the testing system was constructed from the parts of Thorlabs company . The functionality was controlled with this system and the results of measuring were compared with the profilometer. In next step technical drawings were created and the whole system was made.
interferometry, Michelson interferometer, reactive ion etching, RIE, precise measuring of length
Date of defence
21.06.2016
Result of the defence
Defended (thesis was successfully defended)
Grading
A
Language of thesis
Czech
Faculty
Fakulta strojního inženýrství
Department
Institute of Physical Engineering
Study programme
Applied Sciences in Engineering (N3901-2)
Field of study
Precise Mechanics and Optics (M-PMO)
Composition of Committee
prof. RNDr. Tomáš Šikola, CSc. (předseda) prof. RNDr. Miroslav Liška, DrSc. (místopředseda) prof. RNDr. Bohumila Lencová, CSc. (člen) prof. RNDr. Jiří Komrska, CSc. (člen) prof. RNDr. Petr Dub, CSc. (člen) prof. RNDr. Radim Chmelík, Ph.D. (člen) prof. RNDr. Jiří Spousta, Ph.D. (člen) prof. Ing. Ivan Křupka, Ph.D. (člen) prof. RNDr. Pavel Zemánek, Ph.D. (člen) RNDr. Antonín Fejfar, CSc. (člen) prof. RNDr. Eduard Schmidt, CSc. (člen)
Supervisor’s reportIng. Mojmír Šerý, Ph.D.
Grade proposed by supervisor: A
Reviewer’s reportIng. Martin Antoš, Ph.D.
Grade proposed by reviewer: B
Responsibility: Mgr. et Mgr. Hana Odstrčilová