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Bachelor's Thesis
Author of thesis: Ing. Tomáš Axman
Acad. year: 2015/2016
Supervisor: doc. Ing. Petr Bábor, Ph.D.
Reviewer: Ing. Michal Pavera, Ph.D.
This bachelor thesis focuses on design and testing of a sample holder enabling for cooling and heating of the sample in ultra-high vacuum apparatus for scanning electron microscope, developed in cooperation with Tescan company. In the theoretical part the currently used sample holders in similar UHV systems are described and their positives and negatives are discussed including material selection. The experimental part describes designing of the sample holder with respect to the required number of electrical contacts for measuring electrical properties of the samples and UHV compatibility. Measurement and testing of the manufactured sample at low and high temperatures is presented.
UHV SEM, sample holder, palettes holder, stack of palette, temperature separation
Date of defence
23.06.2016
Result of the defence
Defended (thesis was successfully defended)
Grading
A
Language of thesis
Czech
Faculty
Fakulta strojního inženýrství
Department
Institute of Physical Engineering
Study programme
Applied Sciences in Engineering (B3901-3)
Field of study
Physical Engineering and Nanotechnology (B-FIN)
Composition of Committee
prof. RNDr. Tomáš Šikola, CSc. (předseda) prof. RNDr. Miroslav Liška, DrSc. (místopředseda) prof. RNDr. Bohumila Lencová, CSc. (člen) prof. RNDr. Petr Dub, CSc. (člen) prof. RNDr. Radim Chmelík, Ph.D. (člen) prof. RNDr. Jiří Spousta, Ph.D. (člen) prof. Ing. Ivan Křupka, Ph.D. (člen) prof. RNDr. Pavel Zemánek, Ph.D. (člen) RNDr. Antonín Fejfar, CSc. (člen) doc. Ing. Radek Kalousek, Ph.D. (člen)
Supervisor’s reportdoc. Ing. Petr Bábor, Ph.D.
Grade proposed by supervisor: A
Reviewer’s reportIng. Michal Pavera, Ph.D.
Grade proposed by reviewer: B
Responsibility: Mgr. et Mgr. Hana Odstrčilová