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Bachelor's Thesis
Author of thesis: Ing. Rudolf Šárközi
Acad. year: 2014/2015
Supervisor: doc. Ing. Petr Bábor, Ph.D.
Reviewer: doc. Ing. Jindřich Mach, Ph.D.
This work focus on the development and the design of the effusion cell that is able to deposit different materials in downward orientation. The Cell itself should be placed into the ultra-vacuum microscope (UHV-SEM) developed in TESCAN company in the collaboration with Institute of Physical Engineering. Theoretical part is devoted to the description of the electron microscope and its, in the future installed, parts, which will be used for the preparation and the analysis of the nanostructures. In this work, the first measurements with the electron microscope are presented, and the influence of mechanical vibrations to image quality is discussed.
UHV chamber, scanning electron microscopy, focused ion beam, effusion cell, crucible, deposition, nanostructures.
Date of defence
24.06.2015
Result of the defence
Defended (thesis was successfully defended)
Grading
B
Language of thesis
Slovak
Faculty
Fakulta strojního inženýrství
Department
Institute of Physical Engineering
Study programme
Applied Sciences in Engineering (B3901-3)
Field of study
Physical Engineering and Nanotechnology (B-FIN)
Composition of Committee
prof. RNDr. Tomáš Šikola, CSc. (předseda) prof. RNDr. Miroslav Liška, DrSc. (místopředseda) prof. RNDr. Bohumila Lencová, CSc. (člen) prof. RNDr. Jiří Komrska, CSc. (člen) prof. RNDr. Petr Dub, CSc. (člen) prof. RNDr. Radim Chmelík, Ph.D. (člen) prof. RNDr. Jiří Spousta, Ph.D. (člen) prof. Ing. Ivan Křupka, Ph.D. (člen) prof. RNDr. Pavel Zemánek, Ph.D. (člen) RNDr. Antonín Fejfar, CSc. (člen)
Supervisor’s reportdoc. Ing. Petr Bábor, Ph.D.
Grade proposed by supervisor: B
Reviewer’s reportdoc. Ing. Jindřich Mach, Ph.D.
Grade proposed by reviewer: C
Responsibility: Mgr. et Mgr. Hana Odstrčilová