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Bachelor's Thesis
Author of thesis: Ing. Jakub Kuba
Acad. year: 2013/2014
Supervisor: prof. Ing. Miroslav Kolíbal, Ph.D.
Reviewer: Ing. Josef Polčák, Ph.D.
The thesis deals with passivation of germanium surfaces by chemical etching and atomic layer deposition (ALD). Attention was paid to the rate of oxidation of germanium surfaces after selected passivation methods and the composition of the germanium suboxides. In the thesis selected methods for germanium oxide removal are reviewed and a brief description of the methods used for analysis (XPS) and thin film deposition (ALD) is given.
Germanium, Ge, passivation, native oxides, X-ray photoelectron spectroscopy, atomic layer deposition.
Date of defence
25.06.2014
Result of the defence
Defended (thesis was successfully defended)
Grading
A
Language of thesis
Czech
Faculty
Fakulta strojního inženýrství
Department
Institute of Physical Engineering
Study programme
Applied Sciences in Engineering (B3901-3)
Field of study
Physical Engineering and Nanotechnology (B-FIN)
Composition of Committee
prof. RNDr. Tomáš Šikola, CSc. (předseda) prof. RNDr. Miroslav Liška, DrSc. (místopředseda) prof. RNDr. Bohumila Lencová, CSc. (člen) prof. RNDr. Jiří Komrska, CSc. (člen) prof. RNDr. Petr Dub, CSc. (člen) prof. RNDr. Radim Chmelík, Ph.D. (člen) prof. RNDr. Jiří Spousta, Ph.D. (člen) prof. Ing. Ivan Křupka, Ph.D. (člen) prof. RNDr. Pavel Zemánek, Ph.D. (člen) RNDr. Antonín Fejfar, CSc. (člen)
Supervisor’s reportprof. Ing. Miroslav Kolíbal, Ph.D.
Grade proposed by supervisor: A
Reviewer’s reportIng. Josef Polčák, Ph.D.
Grade proposed by reviewer: A
Responsibility: Mgr. et Mgr. Hana Odstrčilová