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Master's Thesis
Author of thesis: Ing. Tomáš Novák
Acad. year: 2013/2014
Supervisor: Ing. Stanislav Voborný, Ph.D.
Reviewer: Ing. Petr Kostelník, Ph.D.
This thesis deals with deposition of GaN thin films and GaN selective growth utilizing pyrolyzed resist masks. Carbon masks were prepared on silicon substrates by electron-beam litography and resist pyrolysis. As a further step, Ga and GaN were deposited on the masked substrates by Moleculer Beam Epitaxy (MBE) method. A selective growth of Ga droplets was achieved. These results were used for preparation of GaN crystallites by pulse deposition. It is also shown that direct MBE deposition of GaN on the masked substrates leads to a selective growth of GaN thin films with GaN film growing only on the areas which are not covered by the carbon mask. The results are explained by enhanced surface diffusion of gallium atoms on the surface of the carbon mask.
GaN, thin films, selective growth, pyrolysis of resist, amorphous carbon, carbon masks, Ga droplets, Ga surface diffusion
Date of defence
22.10.2013
Result of the defence
Defended (thesis was successfully defended)
Grading
A
Language of thesis
Czech
Faculty
Fakulta strojního inženýrství
Department
Institute of Physical Engineering
Study programme
Applied Sciences in Engineering (N3901-2)
Field of study
Physical Engineering and Nanotechnology (M-FIN)
Composition of Committee
prof. RNDr. Tomáš Šikola, CSc. (předseda) prof. RNDr. Miroslav Liška, DrSc. (místopředseda) prof. RNDr. Bohumila Lencová, CSc. (člen) prof. RNDr. Jiří Komrska, CSc. (člen) prof. RNDr. Petr Dub, CSc. (člen) prof. RNDr. Radim Chmelík, Ph.D. (člen) prof. RNDr. Jiří Spousta, Ph.D. (člen) prof. Ing. Ivan Křupka, Ph.D. (člen) prof. RNDr. Pavel Zemánek, Ph.D. (člen) RNDr. Antonín Fejfar, CSc. (člen)
Supervisor’s reportIng. Stanislav Voborný, Ph.D.
Grade proposed by supervisor: A
Reviewer’s reportIng. Petr Kostelník, Ph.D.
Grade proposed by reviewer: A
Responsibility: Mgr. et Mgr. Hana Odstrčilová