Přístupnostní navigace
E-application
Search Search Close
Bachelor's Thesis
Author of thesis: Ing. Tomáš Novák
Acad. year: 2010/2011
Supervisor: Ing. Stanislav Voborný, Ph.D.
Reviewer: doc. Ing. Jindřich Mach, Ph.D.
This bachelor´s thesis deals with modification and experimental application of the ion device, generating and transporting nitrogen ion beam with energy in a range of 10-100 eV. Together with gallium effusion cell, this device can be used for deposition of gallium nitride (GaN) thin films. Nitrogen ion beam current significantly increased by shortening the optical part of the ion gun. A differential pumping provides the system with ultrahigh-vacuum conditions in the deposition chamber. Profiles of ion current density, appropriate for GaN depositions, were found by the optimization of potentials applied on electrodes of the ion gun. Due to increase of nitrogen-ion current, the depositon rate of the system raised from about tenth of nm/h to more than 10 nm/h. For experiments described in this paper, monocrystalline silicon (111) was used as a substrate. The effect of gallium and nitrogen ion fluxes on GaN growth was investigated, together with the effect of gold nanoparticles on a GaN growth. Thin films were analyzed by scanning electron microscopy (SEM) and atomic force microscopy (AFM). Several specific morphologies of thin films were observed.
Gallium nitride, ion beam deposition, low energy ions, thin films, gold nanoparticles.
Date of defence
21.06.2011
Result of the defence
Defended (thesis was successfully defended)
Grading
A
Language of thesis
Czech
Faculty
Fakulta strojního inženýrství
Department
Institute of Physical Engineering
Study programme
Applied Sciences in Engineering (B3901-3)
Field of study
Physical Engineering and Nanotechnology (B-FIN)
Composition of Committee
prof. RNDr. Tomáš Šikola, CSc. (předseda) prof. RNDr. Miroslav Liška, DrSc. (místopředseda) prof. RNDr. Bohumila Lencová, CSc. (člen) doc. RNDr. Josef Kuběna, CSc. (člen) prof. RNDr. Jiří Komrska, CSc. (člen) prof. RNDr. Pavel Zemánek, Ph.D. (člen) prof. RNDr. Petr Dub, CSc. (člen) prof. RNDr. Radim Chmelík, Ph.D. (člen) prof. Ing. Ivan Křupka, Ph.D. (člen) prof. RNDr. Jiří Spousta, Ph.D. (člen) RNDr. Antonín Fejfar, CSc. (člen)
Supervisor’s reportIng. Stanislav Voborný, Ph.D.
Grade proposed by supervisor: A
Reviewer’s reportdoc. Ing. Jindřich Mach, Ph.D.
Grade proposed by reviewer: A
Responsibility: Mgr. et Mgr. Hana Odstrčilová