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Bachelor's Thesis
Author of thesis: Ing. Michal Páleníček, Ph.D.
Acad. year: 2009/2010
Supervisor: doc. Ing. Petr Bábor, Ph.D.
Reviewer: doc. Ing. Jindřich Mach, Ph.D.
This thesis deals with concept and realization of device which allows loading without air intake. Vacuum technology and its theoretical bases are discussed as well. Moreover the thesis is based on description of the current deposition chamber and its principles. The main part deals with the description of the concepts of lock and load systems. The first concept that has not been realized is described just briefly. The second one is thorough with description of the individual solutions and methods. The work also contains simple instructions how to install the specimen. At the end are described some outputs of simulations that have been done to comprehend and solve any problems that might occur as specimen holder cooling and deflection of magnetic rod.
ION SPUTERING, VACUUM LOADING, VACUUM TRANSPORT, LOCK AND LOAD SYSTEMS, LOADING CHAMBER
Date of defence
17.06.2010
Result of the defence
Defended (thesis was successfully defended)
Grading
A
Language of thesis
Czech
Faculty
Fakulta strojního inženýrství
Department
Institute of Physical Engineering
Study programme
Applied Sciences in Engineering (B3901-3)
Field of study
Physical Engineering and Nanotechnology (B-FIN)
Composition of Committee
prof. RNDr. Tomáš Šikola, CSc. (předseda) prof. RNDr. Miroslav Liška, DrSc. (místopředseda) prof. RNDr. Bohumila Lencová, CSc. (člen) doc. RNDr. Josef Kuběna, CSc. (člen) prof. RNDr. Jiří Komrska, CSc. (člen) prof. RNDr. Pavel Zemánek, Ph.D. (člen) prof. RNDr. Petr Dub, CSc. (člen) prof. RNDr. Radim Chmelík, Ph.D. (člen) prof. Ing. Ivan Křupka, Ph.D. (člen) prof. RNDr. Jiří Spousta, Ph.D. (člen) RNDr. Antonín Fejfar, CSc. (člen)
Supervisor’s reportdoc. Ing. Petr Bábor, Ph.D.
Grade proposed by supervisor: A
Reviewer’s reportdoc. Ing. Jindřich Mach, Ph.D.
Grade proposed by reviewer: B
Responsibility: Mgr. et Mgr. Hana Odstrčilová