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Bachelor's Thesis
Author of thesis: Bc. Kryštof Kubín
Acad. year: 2025/2026
Supervisor: doc. Ing. Jindřich Mach, Ph.D.
Reviewer: Ing. Stanislav Voborný, Ph.D.
The subject of this bachelor’s thesis is design of a compact Kaufman-type ion source with beam diameter of 30 mm. The intended application is primarily in-situ cleaning of samples in UHV chambers. The design of the ion source is based mostly on sources designed by the original author, Harold R. Kaufman, and on the current Kaufman-type ion sources used at IPE FME. In comparison with the current sources, some design innovations have been incorporated in the designed prototype such as continuous cylindrical anode or electrostatic grids which are seated between sapphire balls. As a part of the design, basic calculations of the magnetic field in the ion source and of the parameters of plasma discharge and the ion beam have been made. The magnetic field has also been numerically simulated. Also, a 3D CAD model and drawings of the designed ion source have been made as well as a CAD model of the current secondary ion source.
Ion source, ion beam, Harold Kaufman, ion beam sputter deposition, ion beam etching
Date of defence
18.06.2026
Result of the defence
Defended (thesis was successfully defended)
Grading
A
Process of defence
Po otázkách oponenta bylo dále diskutováno: - elektrostatické mřížky - ochrana safírových kuliček u elektrod vůči naprašování Student na otázky odpověděl.
Language of thesis
Czech
Faculty
Fakulta strojního inženýrství
Department
Institute of Physical Engineering
Study programme
Fundamentals of Mechanical Engineering (B-ZSI-P)
Specialization
Fundamentals of Mechanical Engineering (STI)
Composition of Committee
prof. Ing. Miroslav Kolíbal, Ph.D. (předseda) prof. RNDr. Tomáš Šikola, CSc. (místopředseda) prof. RNDr. Petr Dub, CSc. (člen) prof. RNDr. Radim Chmelík, Ph.D. (člen) prof. RNDr. Jiří Spousta, Ph.D. (člen) prof. Mgr. Miroslav Černý, Ph.D. (člen) doc. Ing. Radek Kalousek, Ph.D. (člen) doc. Mgr. Vlastimil Křápek, Ph.D. (člen) doc. Ing. Miroslav Bartošík, Ph.D. (člen) doc. Ing. Stanislav Průša, Ph.D. (člen) doc. Ing. Petr Bábor, Ph.D. (člen) doc. Ing. Jindřich Mach, Ph.D. (člen) doc. Ing. Jakub Zlámal, Ph.D. (člen)
Supervisor’s reportdoc. Ing. Jindřich Mach, Ph.D.
Grade proposed by supervisor: A
Reviewer’s reportIng. Stanislav Voborný, Ph.D.
Grade proposed by reviewer: A
Responsibility: Mgr. et Mgr. Hana Odstrčilová