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Doctoral Thesis
Author of thesis: Ing. Michal Bílek
Acad. year: 2025/2026
Supervisor: doc. Ing. Jiří Maxa, Ph.D.
Reviewer: prof. Ing. Vladimír Horák, CSc.
This work deals with the issue of supersonic gas flow at low pressures in differentially pumped chambers used in the field of environmental scanning electron microscopy. The research builds on the activities of the Institute of Scientific Instruments of the Czech Academy of Sciences and the Department of Electrotechnology at Brno University of Technology, Faculty of Electrical Engineering and Communication, and focuses on experimental and CFD analysis of flow in an environment at the boundary of continuum mechanics. The aim of the work is to apply the method of flow-axis mapping using Pitot tubes for measuring static and total pressure and to establish a basis for the further development of this methodology. To achieve these objectives, CFD analyses in the Ansys Fluent system were employed, describing the characteristics of supersonic, underexpanded flow with shock waves across various pressure scales. Based on these analyses, suitable positions for experimental measurements were determined. The work also includes the design, development, and implementation of static and total pressure measurements in an experimental chamber, optimized for small dimensions and minimal disturbance of the flow. The results contribute to a better understanding of jet flow phenomena in differentially pumped systems of environmental electron microscopy and to the development of experimental methods for their measurement.
Ansys Fluent; CFD; Differentially pumped chamber; ESEM; Pitot tube; Perpendicular shock wave; Oblique shock wave
Date of defence
18.03.2026
Result of the defence
Defended (thesis was successfully defended)
Process of defence
Student byl na začátku obhajoby představen a seznámen s průběhem obhajoby. Následovala prezentace představující práci, čtení posudků oponentů, zodpovězení otázek a rozprava se členy komise. V neveřejné části bylo tajně hlasováno o výsledku a následně byl student s rozhodnutím komise seznámen.
Language of thesis
Czech
Faculty
Fakulta elektrotechniky a komunikačních technologií
Department
Department of Electrical and Electronic Technology
Study programme
Microelectronics and technology (DKC-MET)
Composition of Committee
doc. Ing. Jiří Vaněk, Ph.D. (předseda) doc. Ing. Tomáš Binar, Ph.D. (člen) prof. Ing. Václav Uruba, CSc. (člen) prof. Ing. Vladimír Horák, CSc. (člen) doc. Ing. Dalibor Rozehnal, Ph.D. (člen)
Supervisor’s reportdoc. Ing. Jiří Maxa, Ph.D.
Reviewer’s reportprof. Ing. Vladimír Horák, CSc.
Responsibility: Mgr. et Mgr. Hana Odstrčilová