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Master's Thesis
Author of thesis: Bc. Hugo Weisz
Acad. year: 2025/2026
Supervisor: Ing. Pavel Procházka, Ph.D.
Reviewer: Jesús Redondo, Ph.D.
This thesis investigates the influence of lithographic processing and cleaning procedures on the quality of epitaxial graphene grown on SiC and its suitability for subsequent molecular self-assembly. Graphene samples were characterized using atomic force microscopy (AFM), Raman spectroscopy, and low-energy electron microscopy (LEEM) in order to evaluate the effects of resist processing, ultra-high vacuum (UHV) annealing, electron-beam lithography (EBL), and reactive-ion etching (RIE). The results show that lithographic processing introduces surface contamination, while UHV annealing partially restores the graphene surface quality. LEEM bright-field and diffraction measurements confirmed that the contamination of the surface was reduced. Finally, molecular deposition of HMTP on patterned graphene surfaces was successfully performed, demonstrating that molecular self-assembly remains possible despite residual contamination originating from multiple lithographic fabrication steps.
Graphene, low-energy electron microscopy, LEEM, SiC, AFM, Raman spectroscopy, EBL, RIE
Date of defence
16.06.2026
Result of the defence
Defended (thesis was successfully defended)
Grading
A
Process of defence
Po otázkách oponenta bylo dále diskutováno: Pro jaká měření je vzorek připravován? Materiálový kontrast v obrázcích LEEM. Terminace grafenu na začátku výrobního procesu. Student na otázky odpověděl.
Language of thesis
English
Faculty
Fakulta strojního inženýrství
Department
Institute of Physical Engineering
Study programme
Physical Engineering and Nanotechnology (N-FIN-P)
Composition of Committee
prof. RNDr. Tomáš Šikola, CSc. (předseda) prof. RNDr. Jiří Spousta, Ph.D. (místopředseda) prof. RNDr. Pavel Zemánek, Ph.D. (člen) prof. Mgr. Dominik Munzar, Dr. (člen) doc. Mgr. Adam Dubroka, Ph.D. (člen) prof. Ing. Jan Čechal, Ph.D. (člen) prof. RNDr. Jiří Petráček, Dr. (člen) prof. RNDr. Radim Chmelík, Ph.D. (člen) doc. Ing. Radek Kalousek, Ph.D. (člen) prof. Ing. Miroslav Kolíbal, Ph.D. (člen) doc. Ing. Stanislav Průša, Ph.D. (člen) doc. Mgr. Vlastimil Křápek, Ph.D. (člen) RNDr. Antonín Fejfar, CSc. (člen)
Supervisor’s reportIng. Pavel Procházka, Ph.D.
Grade proposed by supervisor: A
Reviewer’s reportJesús Redondo, Ph.D.
Grade proposed by reviewer: A
Responsibility: Mgr. et Mgr. Hana Odstrčilová