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Master's Thesis
Author of thesis: Bc. Radim Slovák
Acad. year: 2025/2026
Supervisor: Ing. Filip Ligmajer, Ph.D.
Reviewer: Prof. Haiyan Ou
This thesis focuses on the design, simulation, fabrication, and experimental characterization of silicon carbide photonic integrated circuits fabricated on silicon carbide-on-insulator (SiCOI) platforms for integrated photonics and quantum photonics applications. Passive nanophotonic components, including single-mode waveguides, grating couplers, beam splitters, and ring resonators, were designed and optimized using finite-difference time-domain simulations. The optimized fabricated structures were realized using electron beam lithography and reactive ion etching, followed by optical characterization using a custom measurement setup. The obtained results demonstrate successful light guiding and functionality of fabricated components, confirming the potential of SiCOI as a promising platform for future integrated and quantum photonic devices.
Silicon carbide, SiCOI, photonic integrated circuits, integrated photonics, quantum photonics, color centers, waveguides, grating couplers, ring resonators, multi-mode interferometers, FDTD simulations, nanophotonics
Date of defence
15.06.2026
Result of the defence
Defended (thesis was successfully defended)
Grading
A
Process of defence
Po otázkách oponenta bylo dále diskutováno: Ověříení, že zdroj světla je jednofotonový. Student na otázky odpověděl.
Language of thesis
English
Faculty
Fakulta strojního inženýrství
Department
Institute of Physical Engineering
Study programme
Physical Engineering and Nanotechnology (N-FIN-P)
Composition of Committee
prof. RNDr. Tomáš Šikola, CSc. (předseda) prof. RNDr. Jiří Spousta, Ph.D. (místopředseda) prof. RNDr. Pavel Zemánek, Ph.D. (člen) prof. Mgr. Dominik Munzar, Dr. (člen) doc. Mgr. Adam Dubroka, Ph.D. (člen) prof. Ing. Jan Čechal, Ph.D. (člen) prof. RNDr. Jiří Petráček, Dr. (člen) prof. RNDr. Radim Chmelík, Ph.D. (člen) prof. Ing. Miroslav Kolíbal, Ph.D. (člen) doc. Ing. Radek Kalousek, Ph.D. (člen) doc. Ing. Stanislav Průša, Ph.D. (člen) doc. Mgr. Vlastimil Křápek, Ph.D. (člen) RNDr. Antonín Fejfar, CSc. (člen)
Supervisor’s reportIng. Filip Ligmajer, Ph.D.
Grade proposed by supervisor: A
Reviewer’s reportProf. Haiyan Ou
Grade proposed by reviewer: A
Responsibility: Mgr. et Mgr. Hana Odstrčilová