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Bachelor's Thesis
Author of thesis: Martin Kužílek
Acad. year: 2025/2026
Supervisor: Ing. Michal Horák, Ph.D.
Reviewer: Ing. Vojtěch Švarc, Ph.D.
This experimentally focused bachelor's thesis deals with the determination of the sputtering yield of selected materials (gold, aluminum, titanium, bismuth, copper, silicon, and silicon nitride) and, in its second part, verifies the hypothesis regarding the possible influence of the sputtering yield on the successful fabrication of plasmonic antennas using focused ion beam lithography. The prepared films were characterized by X-ray diffraction, and the depth of the sputtered test structures was measured using atomic force microscopy. The experimental sputtering rates were compared with simulation models and theoretical calculations, which often seemed to be overestimated. Subsequent attempts to fabricate bowtie and bar antennas confirmed fundamental technological limitations. While antennas made of gold, which has one of the highest sputtering yields, can be fabricated with minor imperfections in the form of residual grains, for titanium and aluminum, which on the other hand have some of the lowest sputtering yields, the membrane is breached before all the material surrounding the antenna is sputtered away. In the case of copper, which has a moderate sputtering yield, successful fabrication is prevented by strong preferential sputtering dependent on the crystallographic orientation of the grains. The results of this thesis demonstrate that for these non-noble metals, focused ion beam lithography on thin membranes is an unviable method for the fabrication of plasmonic antennas.
Plasmonic antennas, sputter yield, FIB, lithography, IBAD
Date of defence
18.06.2026
Result of the defence
Defended (thesis was successfully defended)
Grading
B
Process of defence
Po otázkách oponenta bylo dále diskutováno: - nejistoty měření - měření proudu v iontového svazku - naměřené difraktogramy - rozdíly v simulační metodě SRIM a TRIM Student na otázky odpověděl.
Language of thesis
Czech
Faculty
Fakulta strojního inženýrství
Department
Institute of Physical Engineering
Study programme
Physical Engineering and Nanotechnology (B-FIN-P)
Composition of Committee
prof. Ing. Miroslav Kolíbal, Ph.D. (předseda) prof. RNDr. Tomáš Šikola, CSc. (místopředseda) prof. RNDr. Radim Chmelík, Ph.D. (člen) prof. RNDr. Petr Dub, CSc. (člen) prof. Mgr. Miroslav Černý, Ph.D. (člen) prof. Ing. Jan Čechal, Ph.D. (člen) prof. RNDr. Jiří Spousta, Ph.D. (člen) doc. Mgr. Vlastimil Křápek, Ph.D. (člen) doc. Ing. Miroslav Bartošík, Ph.D. (člen) doc. Ing. Jakub Zlámal, Ph.D. (člen) doc. Ing. Stanislav Průša, Ph.D. (člen) doc. Ing. Radek Kalousek, Ph.D. (člen)
Supervisor’s reportIng. Michal Horák, Ph.D.
Grade proposed by supervisor: A
Reviewer’s reportIng. Vojtěch Švarc, Ph.D.
Grade proposed by reviewer: B
Responsibility: Mgr. et Mgr. Hana Odstrčilová