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Bachelor's Thesis
Author of thesis: Tibor Kokoška
Acad. year: 2025/2026
Supervisor: Mgr. Jan Stopka, Ph.D.
Reviewer: doc. Ing. Jakub Zlámal, Ph.D.
Stochastic Coulomb interactions deteriorate the resolution of probe-forming instruments. For this thesis, the scanning electron microscope is of interest. Usually, such device has at least one aperture stop, and operates in so-called weak regime of Coulomb interactions, which enables the use of slice method for analytical calculation of these random processes. The method depends on particles gaining small perturbations as they traverse the optical column. A question is then posed, how does the method hold when the beam is apertured? In the first chapters, we go through a vertical slice of charged-particle optics. An overview is given for particle optics simulators and reasoning is provided for why we decided to use General Particle Tracer. Lower and upper analytical limits are established as benchmarks against which the Monte Carlo simulations will be compared. A detailed picture is painted on how the quality of the simulation depends on its configuration, and how one must balance between accuracy and reasonable compute time. The results are then compared and visualised via numerous graphs of relative error. In the end, we have shown that the slice method does not hold up well for the case of beam truncation occurring near the generation of particles. A deeper incursion into explaining why this occurs and how can it be accounted for is left to further studies.
Stochastic Coulomb interactions, aperture stop, electron microscope, General Particle Tracer, Monte Carlo method
Date of defence
17.06.2026
Result of the defence
Defended (thesis was successfully defended)
Grading
B
Process of defence
Po otázkách oponenta bylo dále diskutováno: - co přesně znamené pojem "složitost výpočtu" uvedený v prácí - význam pojmu "Runge-Kutta driver" uvedeného v práci - užití pojmu kinetická hybnost Student na otázky odpověděl.
Language of thesis
English
Faculty
Fakulta strojního inženýrství
Department
Institute of Physical Engineering
Study programme
Physical Engineering and Nanotechnology (B-FIN-P)
Composition of Committee
prof. Ing. Miroslav Kolíbal, Ph.D. (předseda) prof. RNDr. Tomáš Šikola, CSc. (místopředseda) prof. RNDr. Jiří Spousta, Ph.D. (člen) prof. RNDr. Petr Dub, CSc. (člen) prof. Ing. Jan Čechal, Ph.D. (člen) prof. Mgr. Miroslav Černý, Ph.D. (člen) doc. Mgr. Vlastimil Křápek, Ph.D. (člen) doc. Ing. Stanislav Průša, Ph.D. (člen) doc. Ing. Miroslav Bartošík, Ph.D. (člen) doc. Ing. Radek Kalousek, Ph.D. (člen) doc. Ing. Jakub Zlámal, Ph.D. (člen) prof. RNDr. Radim Chmelík, Ph.D. (člen)
Supervisor’s reportMgr. Jan Stopka, Ph.D.
Grade proposed by supervisor: B
Reviewer’s reportdoc. Ing. Jakub Zlámal, Ph.D.
Grade proposed by reviewer: B
Responsibility: Mgr. et Mgr. Hana Odstrčilová