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Master's Thesis
Author of thesis: Ing. Filip Ulč
Acad. year: 2025/2026
Supervisor: prof. Ing. Miroslav Kolíbal, Ph.D.
Reviewer: Mgr. Petr Klapetek, Ph.D.
This master's thesis focuses on explaining the physical behavior and fundamental principles of a new method, EBC-AFM (Electron-Beam Enhanced Conductive Atomic Force Microscopy), which is essential for correctly interpreting measurements. The main goal of the thesis is to theoretically explain the measurement principle and to validate it experimentally. The thesis presents a macroscopic model based on the law of charge conservation, which links the emission of backscattered and secondary electrons to the current flowing through the probe tip. The theoretical assumptions were first tested on an isolated gold reference structure. This step verified how basic electron microscope parameters and the geometric setup affect the measured current. The findings were then applied to characterize semiconductors (Ge, InAs, SiC) and to map a 3D NAND memory and an AlGaN/GaN heterostructure. Furthermore, using a back-gate bias helped overcome the surface oxide layer, thereby increasing the measured current. In addition, studying dislocations in the AlGaN/GaN heterostructure showed the technique's ability to capture dynamic changes in the material while simultaneously detecting the measured current and secondary emission. The thesis thus maps and explains in detail the physical phenomena that occur during measurement, providing the necessary theoretical and experimental foundation for future use of this technique.
EBC-AFM, Litescope, SEM, C-AFM, electron emission, Back-gate effect, GaN
Date of defence
15.06.2026
Result of the defence
Defended (thesis was successfully defended)
Grading
A
Process of defence
Po otázkách oponenta bylo dále diskutováno: Bylo by možné použít i taping mód a použít jiné typy hrotů. Souvislost měřeného proudu s dopováním SiC. Šlo by provádět hloubkové profilování. Student na otázky odpověděl.
Language of thesis
English
Faculty
Fakulta strojního inženýrství
Department
Institute of Physical Engineering
Study programme
Physical Engineering and Nanotechnology (N-FIN-P)
Composition of Committee
prof. RNDr. Tomáš Šikola, CSc. (předseda) prof. RNDr. Jiří Spousta, Ph.D. (místopředseda) prof. RNDr. Pavel Zemánek, Ph.D. (člen) prof. Mgr. Dominik Munzar, Dr. (člen) doc. Mgr. Adam Dubroka, Ph.D. (člen) prof. Ing. Jan Čechal, Ph.D. (člen) prof. RNDr. Jiří Petráček, Dr. (člen) prof. RNDr. Radim Chmelík, Ph.D. (člen) prof. Ing. Miroslav Kolíbal, Ph.D. (člen) doc. Ing. Radek Kalousek, Ph.D. (člen) doc. Ing. Stanislav Průša, Ph.D. (člen) doc. Mgr. Vlastimil Křápek, Ph.D. (člen) RNDr. Antonín Fejfar, CSc. (člen)
Supervisor’s reportprof. Ing. Miroslav Kolíbal, Ph.D.
Grade proposed by supervisor: A
Reviewer’s reportMgr. Petr Klapetek, Ph.D.
Grade proposed by reviewer: A
Responsibility: Mgr. et Mgr. Hana Odstrčilová