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Master's Thesis
Author of thesis: Ing. Eliška Boleloucká
Acad. year: 2025/2026
Supervisor: prof. RNDr. Jiří Spousta, Ph.D.
Reviewer: doc. Ing. Alexandr Knápek, Ph.D.
This master’s thesis focuses on the implementation, verification, and characterization of laser-assisted local thermal oxidation of transition metal thin films. The experimental work involved the reassembly of a unique setup integrated into the LiteScope SPM module inside a scanning electron microscope chamber. This system utilizes a multifunctional probe with a hollow core optical fiber for the simultaneous transport of intense laser light and reactive gas directly to the probe-sample interaction site. The correct functionality of the setup was initially validated on reference vanadium thin films, where Raman spectroscopy confirmed the successful synthesis of vanadium dioxide exhibiting a reversible metalinsulator transition. Subsequently, this methodology was extended to titanium and chromium thin films. The resulting local VO2, TiO2 and Cr2O3 domains were analyzed using optical microscopy, scanning electron microscopy (SEM), Raman spectroscopy, and atomic force microscopy (AFM), while describing the influence of the properties and thermal conductivity of the substrates on the oxidation threshold powers and layer morphology.
SEM, AFM, LiteScope, multifunctional probe, hollow core optical fiber, laser-assisted local oxidation, thin films
Date of defence
15.06.2026
Result of the defence
Defended (thesis was successfully defended)
Grading
A
Process of defence
Po otázkách oponenta bylo dále diskutováno: Ramanovská spektra VO2(R), důvod absence píků. Kontrola kovových povrchů před oxidací. Role fotonů při oxidaci, vazební energie molekuly O2. Studentka na otázky odpověděla.
Language of thesis
Czech
Faculty
Fakulta strojního inženýrství
Department
Institute of Physical Engineering
Study programme
Physical Engineering and Nanotechnology (N-FIN-P)
Composition of Committee
prof. RNDr. Tomáš Šikola, CSc. (předseda) prof. RNDr. Jiří Spousta, Ph.D. (místopředseda) prof. RNDr. Pavel Zemánek, Ph.D. (člen) prof. Mgr. Dominik Munzar, Dr. (člen) doc. Mgr. Adam Dubroka, Ph.D. (člen) prof. Ing. Jan Čechal, Ph.D. (člen) prof. RNDr. Jiří Petráček, Dr. (člen) prof. RNDr. Radim Chmelík, Ph.D. (člen) prof. Ing. Miroslav Kolíbal, Ph.D. (člen) doc. Ing. Radek Kalousek, Ph.D. (člen) doc. Ing. Stanislav Průša, Ph.D. (člen) doc. Mgr. Vlastimil Křápek, Ph.D. (člen) RNDr. Antonín Fejfar, CSc. (člen)
Supervisor’s reportprof. RNDr. Jiří Spousta, Ph.D.
Grade proposed by supervisor: A
Reviewer’s reportdoc. Ing. Alexandr Knápek, Ph.D.
Grade proposed by reviewer: A
Responsibility: Mgr. et Mgr. Hana Odstrčilová