Přístupnostní navigace
E-application
Search Search Close
Master's Thesis
Author of thesis: Ing. Marek Děcký
Acad. year: 2024/2025
Supervisor: Mgr. Jiří Liška, Ph.D.
Reviewer: Mgr. Michal Kiaba, Ph.D.
This diploma thesis focuses on the study, design, fabrication, and characterization of a combined detector for visible and infrared radiation. A literature review was conducted. The main result was achieved through several intermediate steps: the design, fabrication, and characterization of the detector. Sensitivity to visible light was based on electrical conduction (leakage current) at the metal/silicon dioxide/silicon interface, while infrared detection used an uncooled microbolometer with plasmonic antennas to enhance absorption via strong coupling between localized surface plasmons of gold antennas and phonons in the thin silicon dioxide layer. The multi-step fabrication involved electron beam lithography and thin-film deposition. All samples were made on silicon substrates, differing in silicon dioxide layer thickness and its preparation, and meander materials. Type one samples had titanium meanders on thermal silicon dioxide. Type two had platinum meanders on evaporated silicon dioxide. Resistance measurements showed that titanium meanders had decreasing resistance with rising temperature (semiconductor behaviour), while platinum meanders showed increasing resistance (metallic behaviour). The final detector responded strongly to visible light and heating on a hot plate, but not to infrared radiation from a blackbody source
Combined detector, leakage current, microbolometer, plasmonics, strong coupling, plasmonic antenna, lithography, thin film deposition
Date of defence
10.06.2025
Result of the defence
Defended (thesis was successfully defended)
Grading
C
Process of defence
Po otázkách oponenta bylo dále diskutováno: Proč se titan choval jako polovodič? Úspěšnost výroby senzorů. Důvod vzniku maxim na závislosti odporu na teplotě. Student na otázky odpověděl.
Language of thesis
Czech
Faculty
Fakulta strojního inženýrství
Department
Institute of Physical Engineering
Study programme
Physical Engineering and Nanotechnology (N-FIN-P)
Composition of Committee
prof. RNDr. Tomáš Šikola, CSc. (předseda) prof. RNDr. Jiří Spousta, Ph.D. (místopředseda) prof. RNDr. Pavel Zemánek, Ph.D. (člen) prof. Mgr. Dominik Munzar, Dr. (člen) doc. Mgr. Adam Dubroka, Ph.D. (člen) prof. RNDr. Petr Dub, CSc. (člen) prof. Ing. Jan Čechal, Ph.D. (člen) prof. RNDr. Jiří Petráček, Dr. (člen) prof. RNDr. Radim Chmelík, Ph.D. (člen) doc. Ing. Radek Kalousek, Ph.D. (člen) prof. Ing. Miroslav Kolíbal, Ph.D. (člen) doc. Ing. Stanislav Průša, Ph.D. (člen) doc. Mgr. Vlastimil Křápek, Ph.D. (člen) RNDr. Antonín Fejfar, CSc. (člen)
Supervisor’s reportMgr. Jiří Liška, Ph.D.
Grade proposed by supervisor: D
Reviewer’s reportMgr. Michal Kiaba, Ph.D.
Grade proposed by reviewer: C
Responsibility: Mgr. et Mgr. Hana Odstrčilová