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Master's Thesis
Author of thesis: Ing. Beáta Idesová
Acad. year: 2022/2023
Supervisor: Ing. Filip Ligmajer, Ph.D.
Reviewer: Haoran Ren, Ph.D.
This thesis explores metasurfaces operating at ultraviolet (UV) wavelengths as alternatives to conventional optical elements like lenses or holograms. Metasurfaces offer advantages over traditional optical elements such as a reduced footprint of optical systems or multifunctionality within a single device. We start this work with a literature review devoted to UV metalenses and UV metaholograms. We mainly focus on HfO2 and AlN material platforms because of their high index of refraction (>2) and low losses down to deep-UV region, and we compare fabrication approaches involving these materials. The most promising fabrication recipes were optimized in the practical part of the thesis: HfO2 metasurfaces were fabricated using atomic layer deposition into masks pre-patterned by electron beam lithography, while AlN metasurfaces were etched through hard chromium masks. We demonstrated successful fabrication of HfO2 metalenses made of high aspect-ratio nanopillars with circular cross-sections, while the fabrication of AlN metasurfaces faced challenges, which were thoroughly discussed as well. Characterization of the final HfO2 metalenses in terms of intensity profiles was done in a custom-made experimental optical setup. The metalenses showed promising performance for the wavelength 325 nm, although slight deviations from the design were observed and are discussed in the context of theoretical calculations. The findings of this work emphasize the importance of thorough optimization for the future fabrication of UV metasurfaces.
metasurface, UV metasurface, UV metalens, HfO2 nanostructures, AlN nanostructures, ultraviolet wavelengths
Date of defence
19.06.2023
Result of the defence
Defended (thesis was successfully defended)
Grading
A
Process of defence
Po otázkách oponenta bylo dále diskutováno: Geometrická fáze, použití například pro dělič svazku. Vliv nepřesností rozměrů nanostruktur na polohu ohniska čočky. Kontrast obrazu nanostruktur v rastrovacím elektronovém mikroskopu. Studentka odpověděla na otázky bez zaváhání.
Language of thesis
English
Faculty
Fakulta strojního inženýrství
Department
Institute of Physical Engineering
Study programme
Physical Engineering and Nanotechnology (N-FIN-P)
Composition of Committee
prof. RNDr. Tomáš Šikola, CSc. (předseda) prof. RNDr. Jiří Spousta, Ph.D. (místopředseda) prof. Mgr. Dominik Munzar, Dr. (člen) doc. Mgr. Adam Dubroka, Ph.D. (člen) prof. RNDr. Petr Dub, CSc. (člen) prof. RNDr. Bohumila Lencová, CSc. (člen) prof. RNDr. Jiří Petráček, Dr. (člen) prof. RNDr. Radim Chmelík, Ph.D. (člen) doc. Ing. Radek Kalousek, Ph.D. (člen) prof. Ing. Miroslav Kolíbal, Ph.D. (člen) doc. Ing. Stanislav Průša, Ph.D. (člen) RNDr. Antonín Fejfar, CSc. (člen)
Supervisor’s reportIng. Filip Ligmajer, Ph.D.
Grade proposed by supervisor: A
Reviewer’s reportHaoran Ren, Ph.D.
Grade proposed by reviewer: A
Responsibility: Mgr. et Mgr. Hana Odstrčilová