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Bachelor's Thesis
Author of thesis: Ing. Marek Děcký
Acad. year: 2021/2022
Supervisor: Mgr. Jiří Liška, Ph.D.
Reviewer: Ing. Pavel Gallina
This bachelor’s thesis is focused on study and fabrication of infrared detectors. Other than just providing a literature research and plasmonics research into the topic, the main goal of this thesis is to propose new designs, manufacturing and characterization such detectors. Specifically the uncooled microbolometer that uses plasmonic antennas for the amplification of the strong coupling which forms between the localized surface plasmons of golden antennas and a phonons of thin dielectric film made from silicon dioxide. The preparation of several types of microbolometers on silicon substrates was conducted using electron beam lithography, photolithography and by thin film deposition techniques. The individual microbolometers differed mainly in the width of the layers between the temperature sensitive meanders and the antennas, but also in the dimensions of the antennas. In the first two sets of microbolometers, the meanders were made from titanium, however meanders in the last set of microbolometers were fabricated from platinum. Reaction of the microbolometers on visible and infrared radiation was tested using measurement of electrical resistance. It was discovered that fabricated microbolometers with titanium meanders significantly reacted on visible light by lowering their resistance. This means they behave like semiconductor. Microbolometers also reacted on infrared radiation by lowering their resistance, but only when temperature of black body source exceeded 400 °C. Reaction on visible and infrared radiation was not observed on microbolometers with platinum meanders with one exception.
Microbolometer, plasmonics, plasmonic antenna, strong coupling, lithography, thin film deposition
Date of defence
16.06.2022
Result of the defence
Defended (thesis was successfully defended)
Grading
B
Process of defence
Po otázkách oponenta bylo diskutováno Měření odporu Wheatstoneovým můstkem. Vznik hotspotu na plazmonické anténě. Student na otázky odpověděl.
Language of thesis
Czech
Faculty
Fakulta strojního inženýrství
Department
Institute of Physical Engineering
Study programme
Physical Engineering and Nanotechnology (B-FIN-P)
Composition of Committee
prof. RNDr. Tomáš Šikola, CSc. (předseda) prof. RNDr. Jiří Spousta, Ph.D. (místopředseda) doc. Ing. Stanislav Průša, Ph.D. (člen) doc. Mgr. Vlastimil Křápek, Ph.D. (člen) doc. Ing. Miroslav Bartošík, Ph.D. (člen) prof. RNDr. Petr Dub, CSc. (člen) prof. RNDr. Bohumila Lencová, CSc. (člen) prof. RNDr. Miroslav Liška, DrSc. (člen) prof. Ing. Miroslav Kolíbal, Ph.D. (člen) prof. RNDr. Radim Chmelík, Ph.D. (člen) doc. Ing. Radek Kalousek, Ph.D. (člen) RNDr. Antonín Fejfar, CSc. (člen)
Supervisor’s reportMgr. Jiří Liška, Ph.D.
Grade proposed by supervisor: A
Reviewer’s reportIng. Pavel Gallina
Grade proposed by reviewer: B
Responsibility: Mgr. et Mgr. Hana Odstrčilová