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Master's Thesis
Author of thesis: Ing. Filip Vysocký
Acad. year: 2018/2019
Supervisor: prof. Ing. Jan Čechal, Ph.D.
Reviewer: doc. RNDr. Jan Kunc, Ph.D.
This diploma thesis is focused on fabrication of graphene field-effect transistors, characterisation of their transport properties and investigation of low-energy electron beam influence on the devices' properties under UHV conditions. The theoretical part of this work describes graphene fabrication methods, options of graphene transfer onto the substrates for graphene field-effect transistor manufacture. Furthermore, model of graphene doping via electrostatic interaction or photon, resp. electron beam exposition is explained. The experimental part of this work consist of manufacture of the graphene field-effect transistor in order to examine the change of its transport properties induced by doping of the graphene via low-energy electron beam exposition.
Graphene, CVD, FET, electron beam, doping, transport properties
Date of defence
18.06.2019
Result of the defence
Defended (thesis was successfully defended)
Grading
C
Process of defence
Po otázkách oponenta bylo dále diskutováno: Jakým způsobem by probíhala difuze vody na povrchu grafenu? Můžete vysvětlit význam symbolů v rozvnici 2.8? Jaký význam má veličina relativní odpor použitá v některých grafech?
Language of thesis
Czech
Faculty
Fakulta strojního inženýrství
Department
Institute of Physical Engineering
Study programme
Applied Sciences in Engineering (M2A-P)
Field of study
Physical Engineering and Nanotechnology (M-FIN)
Composition of Committee
prof. RNDr. Tomáš Šikola, CSc. (předseda) prof. RNDr. Miroslav Liška, DrSc. (místopředseda) prof. RNDr. Bohumila Lencová, CSc. (člen) prof. RNDr. Jiří Komrska, CSc. (člen) prof. RNDr. Petr Dub, CSc. (člen) prof. RNDr. Radim Chmelík, Ph.D. (člen) prof. RNDr. Jiří Spousta, Ph.D. (člen) prof. RNDr. Eduard Schmidt, CSc. (člen) prof. RNDr. Pavel Zemánek, Ph.D. (člen) RNDr. Antonín Fejfar, CSc. (člen) doc. Ing. Radek Kalousek, Ph.D. (člen)
Supervisor’s reportprof. Ing. Jan Čechal, Ph.D.
Grade proposed by supervisor: A
Reviewer’s reportdoc. RNDr. Jan Kunc, Ph.D.
Grade proposed by reviewer: A
Responsibility: Mgr. et Mgr. Hana Odstrčilová