Přístupnostní navigace
E-application
Search Search Close
Bachelor's Thesis
Author of thesis: Ing. Aleš Konečný
Acad. year: 2018/2019
Supervisor: Dr.techn. Ing. Hermann Detz
Reviewer: M.Sc. Jon Ander Arregi Uribeetxebarria, Ph.D.
The utilization of plasmon polariton waveguides for mid-infrared light has proven its suitability for sensor applications. The waveguide can be surrounded by a gaseous or liquid phase medium, which contains an analyte substance of which the concentration can be measured. The electromagnetic field propagates along the waveguide, which has to satisfy low losses and sufficient interaction conditions. These are fulfilled using a thin dielectric layer applied on a metal surface. This thesis is focused on Si-based dielectrics. Within this work, multilayer waveguides were fabricated by high vacuum magnetron sputtering, plasma-enhanced vapor deposition and photolithography. The deposition was carried out on commonly used Si substrates and is ready to be transfered to InP-based chips. Evaluation of dielectric layers and fabrication methods are based on ellipsometric measurements of refractive index and extinction coefficient in the infrared spectrum.
mid infrared, waveguide, dielectrics, sputtering, pecvd
Date of defence
21.06.2019
Result of the defence
Defended (thesis was successfully defended)
Grading
A
Process of defence
Po otázkách oponenta bylo dále diskutováno: Vhodnost použití hliníku jako metalizační vrstvy ve vlnovodech.
Language of thesis
English
Faculty
Fakulta strojního inženýrství
Department
Institute of Physical Engineering
Study programme
Applied Sciences in Engineering (B3A-P)
Field of study
Physical Engineering and Nanotechnology (B-FIN)
Composition of Committee
prof. RNDr. Tomáš Šikola, CSc. (předseda) prof. RNDr. Miroslav Liška, DrSc. (místopředseda) doc. Ing. Stanislav Průša, Ph.D. (člen) prof. RNDr. Petr Dub, CSc. (člen) prof. RNDr. Radim Chmelík, Ph.D. (člen) prof. RNDr. Jiří Spousta, Ph.D. (člen) doc. Ing. Radek Kalousek, Ph.D. (člen) prof. RNDr. Pavel Zemánek, Ph.D. (člen) RNDr. Antonín Fejfar, CSc. (člen)
Supervisor’s reportDr.techn. Ing. Hermann Detz
Grade proposed by supervisor: A
Reviewer’s reportM.Sc. Jon Ander Arregi Uribeetxebarria, Ph.D.
Grade proposed by reviewer: A
Responsibility: Mgr. et Mgr. Hana Odstrčilová