Bachelor's Thesis

Evaluation of Different Dielectrics For Mid-Infrared Waveguides

Final Thesis 3.93 MB

Author of thesis: Ing. Aleš Konečný

Acad. year: 2018/2019

Supervisor: Dr.techn. Ing. Hermann Detz

Reviewer: M.Sc. Jon Ander Arregi Uribeetxebarria, Ph.D.

Abstract:

The utilization of plasmon polariton waveguides for mid-infrared light has proven its suitability for sensor applications. The waveguide can be surrounded by a gaseous or liquid phase medium, which contains an analyte substance of which the concentration can be measured. The electromagnetic field propagates along the waveguide, which has to satisfy low losses and sufficient interaction conditions. These are fulfilled using a thin dielectric layer applied on a metal surface. This thesis is focused on Si-based dielectrics. Within this work, multilayer waveguides were fabricated by high vacuum magnetron sputtering, plasma-enhanced vapor deposition and photolithography. The deposition was carried out on commonly used Si substrates and is ready to be transfered to InP-based chips. Evaluation of dielectric layers and fabrication methods are based on ellipsometric measurements of refractive index and extinction coefficient in the infrared spectrum.

Keywords:

mid infrared, waveguide, dielectrics, sputtering, pecvd

Date of defence

21.06.2019

Result of the defence

Defended (thesis was successfully defended)

znamkaAznamka

Grading

A

Process of defence

Po otázkách oponenta bylo dále diskutováno: Vhodnost použití hliníku jako metalizační vrstvy ve vlnovodech.

Language of thesis

English

Faculty

Department

Study programme

Applied Sciences in Engineering (B3A-P)

Field of study

Physical Engineering and Nanotechnology (B-FIN)

Composition of Committee

prof. RNDr. Tomáš Šikola, CSc. (předseda)
prof. RNDr. Miroslav Liška, DrSc. (místopředseda)
doc. Ing. Stanislav Průša, Ph.D. (člen)
prof. RNDr. Petr Dub, CSc. (člen)
prof. RNDr. Radim Chmelík, Ph.D. (člen)
prof. RNDr. Jiří Spousta, Ph.D. (člen)
doc. Ing. Radek Kalousek, Ph.D. (člen)
prof. RNDr. Pavel Zemánek, Ph.D. (člen)
RNDr. Antonín Fejfar, CSc. (člen)

Supervisor’s report
Dr.techn. Ing. Hermann Detz

The BSc thesis entitled "Evaluation of Different Dielectrics for Mid-Infrared Waveguides" by Mr. Ales Konecny provides an experimental comparison of different dielectric layers with respect to their integration into plasmonic waveguides for mid-infrared wavelengths. The experimental works cover the fabrication by magnetron sputtering and by plasma-enhanced physical vapor deposition, optical characterization using mid-infrared ellipsometry and lithographic steps to define prototype waveguides. Finally, these results are corroborated by waveguide calculations to estimate the propagation length for sensor chips.

The obtained results provide a solid basis for the future integration and fabrication of mid-infrared sensors at CEITEC. In addition to the commonly used dielectrics SiOx and SiNx, he also started the characterization of TiO2 in the mid-infrared region, which is a risky work package with no guaranteed outcome. The experimental data are therefore immediately useful and will impact future research.

After basic initial training, the student performed the experiments and data analysis fully independently and self-motivated, which needs to be highlighted in particular, since he did the ground-breaking work in a research group that was only recently established at CEITEC. The experimental work was done carefully, ensuring a high reproducibility of the results. The thesis is well-written and clearly summarizes the techniques and advantages or disadvantages of the investigated materials. During this thesis work, Mr. Konecny built up experimental expertise within the CEITEC Nano research infrastructure, which will allow him to tackle more complex research projects in future.
Evaluation criteria Grade
Splnění požadavků a cílů zadání A
Postup a rozsah řešení, adekvátnost použitých metod A
Vlastní přínos a originalita A
Schopnost interpretovat dosažené výsledky a vyvozovat z nich závěry A
Využitelnost výsledků v praxi nebo teorii A
Logické uspořádání práce a formální náležitosti A
Grafická, stylistická úprava a pravopis A
Práce s literaturou včetně citací A
Samostatnost studenta při zpracování tématu A

Grade proposed by supervisor: A

The bachelor thesis of Aleš Konečný deals with the fabrication and characterization of mid-infrared waveguides with potential to be incorporated into devices for sensitive detection of liquid and gas species. The work focuses on the optimization of the dielectric layer on top of the metal, as a way to ensure large propagation distances and increased sensitivity of the waveguides. I was positively impressed by the numerous experimental techniques he employed in the work, including different thin film growth methods, photolithography as well as spectroscopic ellipsometry. The work briefly explores numerical simulations via Lumerical, too. I think that relevant conclusions are obtained in terms of how to minimize the optical absorption of the dielectric layer. While the thesis includes a few minor errors, the manuscript is well structured and it is easy to follow the reasoning utilized, and the English level is satisfactory.

The manuscript slightly misses to point out what is the effect of the different growth temperature on the properties of the dielectric layer (structure, roughness, grain size, presence of defects...) which in turn influence the mid-infrared absorption. It would have been positive to mention such connections between the structural and optical properties in order to better understand the role of the growth temperature. On the other hand, I felt that references were sometimes lacking were due, for example when mentioning the Palik database (page 19), without explicitly including the citation.

Despite these few aspects that could have been further improved, I believe that the work is of very good quality and hence I would like to grant the highest overall mark “A”.
Evaluation criteria Grade
Splnění požadavků a cílů zadání A
Postup a rozsah řešení, adekvátnost použitých metod A
Vlastní přínos a originalita B
Schopnost interpretovat dosaž. výsledky a vyvozovat z nich závěry B
Využitelnost výsledků v praxi nebo teorii A
Logické uspořádání práce a formální náležitosti A
Grafická, stylistická úprava a pravopis B
Práce s literaturou včetně citací C
Topics for thesis defence:
  1. What is the influence of the growth temperature on the dielectric layer physical properties? (structure, etc.) What material properties can be linked in the dielectric layers to a higher or lower absorption (k value)?
  2. Could you please explain better why Al is better for the metallic layer than Au? Which material between the two is more absorptive in the mid-infrared? What other materials do you think that can be of potential use for mid-infrared waveguides, for the metallic and dielectric layers?

Grade proposed by reviewer: A

Responsibility: Mgr. et Mgr. Hana Odstrčilová