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Bachelor's Thesis
Author of thesis: Ing. Kristýna Bukvišová
Acad. year: 2016/2017
Supervisor: doc. Ing. David Salamon, Ph.D.
Reviewer: prof. Ing. Jan Čechal, Ph.D.
Irradiation of a sample surface by the electron beam is known to cause structural changes. One type of these changes is vertical growth of 3D structures on surface of ceramic materials. In the thesis, the conditions necessary for such processes are analysed. A calculation of heating effect of the electron beam is conducted, since a temperature rise can trigger several surface changes. Impact of various e-beam parameters on the growth of 3D structures is investigated. Changes of volume and dimensions of the structures related to the beam parameters are studied using the AFM. The estimated temperature increase is in range of units or maximally tens of K. Significant volumetric growth rate is observed at low voltages and currents. Height of the grown structures can reach 100 nm per minute and depends inversely on beam current.
Scanning electron microscopy, contamination, electron beam heating, ceramic oxides.
Date of defence
09.06.2017
Result of the defence
Defended (thesis was successfully defended)
Grading
A
Language of thesis
English
Faculty
Fakulta strojního inženýrství
Department
Institute of Physical Engineering
Study programme
Applied Sciences in Engineering (B3A-P)
Field of study
Physical Engineering and Nanotechnology (B-FIN)
Composition of Committee
prof. RNDr. Tomáš Šikola, CSc. (předseda) prof. RNDr. Miroslav Liška, DrSc. (místopředseda) prof. RNDr. Bohumila Lencová, CSc. (člen) prof. RNDr. Petr Dub, CSc. (člen) prof. RNDr. Radim Chmelík, Ph.D. (člen) prof. RNDr. Jiří Spousta, Ph.D. (člen) doc. Ing. Radek Kalousek, Ph.D. (člen) prof. RNDr. Pavel Zemánek, Ph.D. (člen) RNDr. Antonín Fejfar, CSc. (člen)
Supervisor’s reportdoc. Ing. David Salamon, Ph.D.
Grade proposed by supervisor: A
Reviewer’s reportprof. Ing. Jan Čechal, Ph.D.
Grade proposed by reviewer: A
Responsibility: Mgr. et Mgr. Hana Odstrčilová